Saturday, September 13, 2025

The JSR Takeover and the New Era of Tech Nationalism: A Photoresist Deep Dive

 

How did the liquid in this tiny bottle become the key to semiconductor dominance? We take a deep dive into the unsung hero of chip manufacturing, ‘photoresist,’ and uncover the secrets of how Japanese companies captured 90% of the global market—from its origins to its geopolitical significance.

Hey everyone! Today, we’re talking about a chemical that’s absolutely essential for making semiconductors, but its name might be a little unfamiliar: ‘photoresist.’ Ever heard of it? It’s a fascinating topic because Japanese companies control nearly 90% of this market. That’s almost a complete monopoly.

So today, we’re going to dig deep into how photoresist technology evolved and how Japanese firms reached their current position, exploring everything from the history and strategy to the geopolitical context. I’ll break it all down so you can grasp this complex story quickly and thoroughly! ๐Ÿ˜Š

 

So, What Exactly Is Photoresist? ๐Ÿค”

Simply put, it’s a light-sensitive liquid used to etch microscopic circuit patterns onto a semiconductor wafer. It reacts to light, much like the film used in photography. Without it, even the most expensive, state-of-the-art lithography equipment would be nothing more than a giant paperweight. Think of it this way: no matter how great your printer is, it’s useless without ink. Photoresist acts as that crucial ink or the stencil for creating the patterns.

The name itself is a hint: ‘Photo’ means light, and ‘resist’ means to withstand. In other words, it’s a material that ‘resists’ certain processes after being exposed to light. The entire process of drawing circuits on a wafer using this principle is called ‘photolithography’.

The 5 Steps of Photolithography at a Glance

  1. Coating: A thin, uniform layer of liquid photoresist is applied to the wafer. (Spin-coating)
  2. Exposure: A mask with the circuit blueprint is placed over the wafer, which is then exposed to ultraviolet (UV) light.
  3. Development: A developer solution selectively dissolves either the exposed or unexposed parts of the photoresist to create the pattern.
  4. Etching: The remaining photoresist acts as a protective barrier while the underlying layer is carved away.
  5. Stripping: Finally, the remaining photoresist is removed, leaving the finished circuit pattern.

Photoresists come in two types: ‘positive-tone,’ which dissolves when exposed to light, and ‘negative-tone,’ which hardens. While negative-tone was developed first, it had an issue where it would slightly swell during the hardening process, which reduced precision in ultra-fine circuits. In contrast, positive-tone resists don't have this problem, allowing for much more precise patterns. That’s why almost all modern processes use positive-tone photoresists.

 

From Asphalt to Advanced Materials: The History of Photoresist ๐Ÿ“œ

Amazingly, the origins of this technology date back to the 1820s in France. An inventor named Nicรฉphore Niรฉpce used a substance similar to asphalt, ‘Bitumen of Judea,’ which hardens when exposed to light, to create the world’s first photograph. This technique was adapted for semiconductors in the 1950s, thanks to a suggestion by William Shockley at Bell Labs, the inventor of the transistor.

Early photographic materials couldn’t withstand the harsh chemicals (like hydrofluoric acid) used in chip manufacturing. So, Kodak, famous for its camera film, stepped in to develop ‘KPR,’ a chemically resistant negative resist, and later ‘KTFR,’ which had better adhesion. KTFR became the industry standard for over 15 years.

๐Ÿ’ก TOK’s Game-Changing Move: The Story of OPR-800
But the real breakthrough was the arrival of positive-tone resist. The key was the ‘DNQ-Novolac’ system, originating from German blueprinting technology, which made much finer circuits possible. This tech spread to the US semiconductor industry, supposedly because a German company's American subsidiary was coincidentally located in the same New Jersey town as Bell Labs, leading to US and European firms dominating the market in the 1970s.

TOK moved incredibly fast. In 1979, it launched its decisive product: ‘OPR-800.’ While its performance was excellent, its true secret to success was its competitive price and the fact that it left less residue on wafers after use. This was a perfect match for the needs of Japan’s booming DRAM companies. They adopted OPR-800 en masse, allowing TOK to capture over 80% of the Japanese market. In a way, OPR-800 was the unsung hero behind Japan’s 1980s DRAM miracle.

 

The Rise of JSR and the Next Tech Leap ๐Ÿš€

While TOK dominated the market, another powerhouse quietly emerged: JSR. Originally a government-backed company making synthetic rubber for tires, JSR pivoted to electronic materials after the oil shock created a crisis. But JSR’s strategy was different.

JSR's Secret Sauce: Open Innovation and Global Strategy

The 1990s shift to DUV was a game-changer, and the solution was IBM’s ‘Chemically Amplified Resist (CAR).’ However, the technology was too sensitive for easy commercialization. Instead of hoarding it, IBM chose ‘open innovation,’ seeking collaboration with firms like JSR and TOK.

For JSR, this was a golden opportunity. At a time when Japan's semiconductor industry was slowing down, JSR used the partnership with IBM as a springboard to get ahead in the race to commercialize ArF photoresist. Building on this collaboration, JSR expanded its portfolio all the way to EUV and secured top-tier overseas clients like Samsung and Intel. By the early 2000s, it had become a true global player, with 70% of its revenue coming from international sales. Boldly leveraging technological partnership to conquer the global market was the core of JSR’s success story.

 

Photoresist at the Center of Geopolitics: The 2019 Japan-Korea Trade Dispute ๐ŸŒ

The strategic importance of photoresist was thrust onto the world stage during the July 2019 trade dispute between Japan and South Korea. Let’s take a closer, neutral look at what happened.

The Dispute and the Stated Positions

  • Japan's Action: In July 2019, the Japanese government tightened export procedures for three materials to South Korea: EUV photoresist, high-purity hydrogen fluoride (HF), and fluorinated polyimides (PI).
  • Japan's Official Stance: The stated reason was national security, citing concerns that these strategic materials could be diverted for military use and that South Korea's export control systems were inadequate.
  • South Korea's Official Stance: It strongly protested the move, framing it as ‘economic retaliation’ for a 2018 South Korean Supreme Court ruling regarding compensation for wartime forced laborers.

So, what was the actual impact on the semiconductor industry? Ultimately, the feared worst-case scenario of a ‘production line shutdown’ never happened.

๐Ÿ’ก Why the Impact Was Limited
The regulations were narrowly focused on EUV photoresist, a cutting-edge technology at the time. Both Samsung and SK Hynix were still in the early stages of adopting EUV, so they didn't require large volumes for mass production immediately. Furthermore, suppliers like JSR had alternative supply routes through joint ventures, such as with IMEC in Belgium, preventing a complete supply chain collapse. The restrictions were eventually lifted in 2023 as relations between the two countries improved.

 

How Does Japan Dominate the Market? ๐Ÿ‡ฏ๐Ÿ‡ต

The dispute is over, but a fundamental question remains: even in the EUV era, how does Japan maintain its absolute leadership in photoresist? The secret isn’t just one thing but a combination of five powerful factors.

Japan's 5 Keys to Photoresist Success
1. Manufacturing Clusters Key players like TOK and JSR are geographically concentrated, creating a hotbed of innovation through the exchange of talent, tech, and information. This environment of competition and cooperation accelerates development.
2. Open Innovation They masterfully adopted external technologies, like IBM's CAR, and evolved from being mere adopters to indispensable co-development partners, fully internalizing the tech.
3. Customer Co-Development Advanced photoresists are not off-the-shelf products. They are custom-tailored solutions developed jointly with clients like Samsung and TSMC, creating a powerful barrier to entry due to massive switching costs.
4. Long-Term Relationships A business culture that prioritizes long-term trust and sustainable partnerships over short-term profits has built incredible stability and customer loyalty.
5. Extreme Quality Control The purity required is astounding—akin to allowing only one drop of impurity in two Olympic-sized swimming pools. This level of quality, built on decades of know-how, is nearly impossible to replicate quickly.
Heads Up! The Market Paradox: Small but Critical
Despite its strategic importance, the photoresist market is tiny compared to the overall semiconductor industry (around $2 billion), and profit margins are not high (JSR ~3.8%, TOK ~7.8%). This creates a ‘high-risk, low-return’ structure, making it vulnerable to outside acquisition attempts. A former JSR chairman once joked that it was ‘smaller than the ramen market in Japan.’

 

A National Asset: The Meaning of the JSR Takeover ๐Ÿข

This structural vulnerability eventually became a reality. After a failed acquisition attempt of JSR by Germany’s Merck in 2022 and continued pressure from activist funds, the Japanese government made an unprecedented move in 2023.

A government-backed fund (JIC) invested approximately $6 billion to acquire JSR, a healthy, profitable private company, and take it private. This was not a bailout; it was a clear declaration that Japan considers photoresist technology a core national asset essential for economic security and sovereignty, and that it would shield it from foreign threats.

๐Ÿ’ก

The Photoresist Story: Key Takeaways

Photographic Origins: It evolved from 19th-century asphalt photography into a critical semiconductor material.
Japan's Winning Strategy: Dominance came not just from tech, but from clusters, open innovation, and deep customer integration.
An Industrial Paradox:
‘Low Profit + High Barrier’ created a vulnerability despite its strategic importance.
The Era of Tech Nationalism: The Japanese government's takeover of JSR proves this liquid is now a national strategic asset.

 

Frequently Asked Questions ❓

Q: How does talent exchange specifically work in Japan's photoresist cluster?

Talent exchange in Japan's photoresist industry is centered around building an ‘Open Innovation Ecosystem.’ Its key feature is the active use of global hubs rather than being confined to a specific region.

1. Global Collaboration at Albany NanoTech Complex: Scientists and engineers from Rapidus collaborate on next-gen technology with global firms like IBM, Samsung Electronics, JSR, and universities at the Albany NanoTech Complex in New York.

2. Rapidus-IBM Partnership: Rapidus is sending over 100 engineers to IBM's facilities to master Gate-All-Around (GAA) technology, crucial for the 2nm process, while also actively recruiting veteran semiconductor engineers within Japan.

3. Research Collaboration with IMEC in Belgium: They leverage international open innovation research hubs by collaborating with world-renowned semiconductor research center IMEC in Belgium.

Q: Are there successful B2B co-development cases in Korea's semiconductor materials sector?

Yes, the most prominent success story is the co-development of EUV photoresist between Dongjin Semichem and Samsung Electronics.

1. Domestic Success: They succeeded in developing EUV photoresist, one of the three items restricted by Japan in 2019, marking a major milestone in technological self-sufficiency.

2. Rapid Implementation: Samsung applied Dongjin Semichem's EUV PR to its mass production lines less than a year after it passed reliability tests, showcasing the success of their close collaboration.

3. Infrastructure and Global Collaboration: Dongjin Semichem made bold investments in its own lithography equipment and forged a partnership with IMEC in Belgium. Building on this, it has become the world's No. 1 supplier of PR for 3D NAND flash, with over 35% market share.

Q: How can Japan's open innovation model be adapted to the Korean context?

[Features of Japan's Open Innovation Model]

1. Consortium-Based Collaboration: ‘Rapidus,’ established in August 2022 with backing from eight major corporations including Toyota and Sony, aims to develop 2nm process technology by 2027, serving as a prime example of a national-level collaborative model.

2. Public-Private Partnership: Since 2021, the Japanese government has used large-scale subsidies to attract global giants like TSMC and Micron while also supporting domestic firms like Kioxia, rapidly restoring its domestic production base.

[Application for Korea]

1. National Strategic Approach: Korea must also recognize the semiconductor industry as a ‘survival strategy’ essential for economic security and move beyond short-term tax credits to establish a robust, long-term financial support system including subsidies, loans, and infrastructure.

2. Fostering Open Innovation: To truly succeed in domesticating materials and equipment, it's crucial to strengthen the quality of private-sector companies to a level that surpasses foreign leaders. This should be an opportunity to advance technological capabilities through open innovation, independent of external policies.

3. A Korean-Style CREATE Model: A six-point CREATE policy is proposed to make Korea a leader in open innovation where the creativity of startups and the global competitiveness of large corporations create synergy. This includes expanding funding for Proof-of-Concept (PoC) and matching funds, and increasing deal-sourcing opportunities.

And that’s a wrap! The story of how the liquid in a tiny bottle is shaping global geopolitics is pretty incredible, isn’t it? It will be fascinating to see how other small but strategically vital industries evolve in the future. If you have any more questions, feel free to ask in the comments! ๐Ÿ˜Š

๋ฐ˜๋„์ฒด ํŒจ๊ถŒ์˜ ์—ด์‡ , ํฌํ† ๋ ˆ์ง€์ŠคํŠธ: ์ผ๋ณธ์€ ์–ด๋–ป๊ฒŒ ์„ธ๊ณ„ 1์œ„๊ฐ€ ๋˜์—ˆ๋‚˜?

 

์ด ์ž‘์€ ๋ณ‘ ์† ์•ก์ฒด๊ฐ€ ์–ด๋–ป๊ฒŒ ๋ฐ˜๋„์ฒด ํŒจ๊ถŒ์˜ ์—ด์‡ ๊ฐ€ ๋์„๊นŒ์š”? ๋ฐ˜๋„์ฒด ๊ณต์ •์˜ ์ˆจ์€ ์ฃผ์—ญ, ‘ํฌํ† ๋ ˆ์ง€์ŠคํŠธ’. ์ผ๋ณธ ๊ธฐ์—…๋“ค์ด ์„ธ๊ณ„ ์‹œ์žฅ์˜ 90%๋ฅผ ์žฅ์•…ํ•˜๊ฒŒ ๋œ ๋น„๋ฐ€์„ ๊ทธ ์‹œ์ž‘๋ถ€ํ„ฐ ์ตœ์‹  ๊ธฐ์ˆ , ๊ทธ๋ฆฌ๊ณ  ์ง€์ •ํ•™์  ๋งฅ๋ฝ๊นŒ์ง€ ๊นŠ์ด ํŒŒํ—ค์ณ ๋ด…๋‹ˆ๋‹ค.

์•ˆ๋…•ํ•˜์„ธ์š”! ์˜ค๋Š˜์€ ๋ฐ˜๋„์ฒด ๋งŒ๋“œ๋Š” ๋ฐ ๊ผญ ํ•„์š”ํ•œ๋ฐ ์ด๋ฆ„์€ ์ข€ ๋‚ฏ์„ , ๊ทธ๋Ÿฐ ํ™”ํ•™ ๋ฌผ์งˆ์— ๋Œ€ํ•œ ์ด์•ผ๊ธฐ์˜ˆ์š”. ๋ฐ”๋กœ ‘ํฌํ† ๋ ˆ์ง€์ŠคํŠธ’์ธ๋ฐ์š”. ํ˜น์‹œ ๋“ค์–ด๋ณด์…จ๋‚˜์š”? ์ด๊ฒŒ ์ •๋ง ํฅ๋ฏธ๋กœ์šด ์ฃผ์ œ์ธ ๊ฒŒ, ์ผ๋ณธ ๊ธฐ์—…๋“ค์ด ์ด ์‹œ์žฅ์˜ ๊ฑฐ์˜ 90%๋ฅผ ์žฅ์•…ํ•˜๊ณ  ์žˆ๋‹ค๋Š” ์‚ฌ์‹ค์ด์—์š”. ๊ฑฐ์˜ ๋…์ ์ด์ฃ .

๊ทธ๋ž˜์„œ ์˜ค๋Š˜, ์ด ํฌํ† ๋ ˆ์ง€์ŠคํŠธ ๊ธฐ์ˆ ์ด ์–ด๋–ป๊ฒŒ ๋ฐœ์ „ํ•ด ์™”๊ณ , ์ผ๋ณธ ๊ธฐ์—…๋“ค์ด ์–ด๋–ป๊ฒŒ ์ง€๊ธˆ์˜ ์œ„์น˜๊นŒ์ง€ ์˜ค๊ฒŒ ๋๋Š”์ง€, ๊ทธ ์—ญ์‚ฌ๋ถ€ํ„ฐ ์ „๋žต, ์ง€์ •ํ•™์  ๋งฅ๋ฝ๊นŒ์ง€ ๊นŠ์ด ํŒŒ๊ณ ๋“ค์–ด ํ•ต์‹ฌ์„ ๋ณด๋ ค๊ณ  ํ•ด์š”. ์ด ๋ณต์žกํ•œ ์ด์•ผ๊ธฐ๋ฅผ ๋น ๋ฅด๋ฉด์„œ๋„ ๊นŠ์ด ์žˆ๊ฒŒ ์ดํ•ดํ•˜์‹ค ์ˆ˜ ์žˆ๋„๋ก ๋„์™€๋“œ๋ฆด๊ฒŒ์š”! ๐Ÿ˜Š

 

ํฌํ† ๋ ˆ์ง€์ŠคํŠธ, ๋Œ€์ฒด ์ •์ฒด๊ฐ€ ๋ญ”๊ฐ€์š”? ๐Ÿค”

์‰ฝ๊ฒŒ ๋งํ•˜๋ฉด, ๋ฐ˜๋„์ฒด ์›จ์ดํผ ์œ„์— ์•„์ฃผ ๋ฏธ์„ธํ•œ ํšŒ๋กœ ํŒจํ„ด์„ ์ƒˆ๊ธธ ๋•Œ ์“ฐ๋Š” ‘๊ฐ๊ด‘์•ก’ ๊ฐ™์€ ๊ฑฐ์˜ˆ์š”. ์‚ฌ์ง„ ํ˜„์ƒํ•  ๋•Œ ์“ฐ๋Š” ํ•„๋ฆ„์ฒ˜๋Ÿผ ๋น›์— ๋ฐ˜์‘ํ•˜๋Š” ๊ฑฐ์ฃ . ์ด๊ฒŒ ์—†์œผ๋ฉด ์ˆ˜์ฒœ์–ต ์›์งœ๋ฆฌ ์ตœ์ฒจ๋‹จ ๋…ธ๊ด‘ ์žฅ๋น„๋„ ๊ทธ๋ƒฅ ๊ณ ์ฒ  ๋ฉ์–ด๋ฆฌ์— ๋ถˆ๊ณผํ•˜๋‹ค๊ณ  ํ•ด์š”. ๋ญ๋ž„๊นŒ, ์•„๋ฌด๋ฆฌ ์ข‹์€ ํ”„๋ฆฐํ„ฐ๊ฐ€ ์žˆ์–ด๋„ ์ž‰ํฌ๊ฐ€ ์—†์œผ๋ฉด ๋ชป ์“ฐ๋Š” ๊ฑฐ๋ž‘ ๋˜‘๊ฐ™์•„์š”. ์ด ํฌํ† ๋ ˆ์ง€์ŠคํŠธ๊ฐ€ ๋ฐ”๋กœ ๊ทธ ์ž‰ํฌ๋‚˜ ํŒจํ„ด์„ ์ฐ๋Š” ํ‹€ ์—ญํ• ์„ ํ•˜๋Š” ๊ฒ๋‹ˆ๋‹ค.

์ด๋ฆ„๋ถ€ํ„ฐ๊ฐ€ ํžŒํŠธ์ธ๋ฐ์š”, ‘ํฌํ† (Photo)’๋Š” ๋น›, ‘๋ ˆ์ง€์ŠคํŠธ(Resist)’๋Š” ์ €ํ•ญํ•œ๋‹ค๋Š” ๋œป์ด์—์š”. ์ฆ‰, ‘๋น›์— ๋ฐ˜์‘ํ•ด์„œ (ํŠน์ • ๊ณต์ •์—) ์ €ํ•ญํ•˜๋Š” ๋ฌผ์งˆ’์ด๋ผ๋Š” ์˜๋ฏธ์ฃ . ์ด ์›๋ฆฌ๋ฅผ ์ด์šฉํ•ด ์›จ์ดํผ ์œ„์— ํšŒ๋กœ๋ฅผ ๊ทธ๋ฆฌ๋Š” ๊ณผ์ •์„ ‘ํฌํ† ๊ณต์ •’ ๋˜๋Š” ‘๋ฆฌ์†Œ๊ทธ๋ž˜ํ”ผ’๋ผ๊ณ  ๋ถ€๋ฆ…๋‹ˆ๋‹ค.

๊ฐ„๋‹จํžˆ ๋ณด๋Š” ํฌํ†  ๊ณต์ • 5๋‹จ๊ณ„

  1. ๋„ํฌ(Coating): ์•ก์ฒด ์ƒํƒœ์˜ ํฌํ† ๋ ˆ์ง€์ŠคํŠธ๋ฅผ ์›จ์ดํผ ์œ„์— ์–‡๊ณ  ๊ท ์ผํ•˜๊ฒŒ ๋ฐœ๋ผ์ค๋‹ˆ๋‹ค. (์Šคํ•€ ์ฝ”ํŒ…)
  2. ๋…ธ๊ด‘(Exposure): ํšŒ๋กœ๋„๊ฐ€ ๊ทธ๋ ค์ง„ ๋งˆ์Šคํฌ๋ฅผ ๋Œ€๊ณ  ์ž์™ธ์„ (UV) ๋น›์„ ์ชผ์—ฌ์ค๋‹ˆ๋‹ค.
  3. ํ˜„์ƒ(Development): ํ˜„์ƒ์•ก์œผ๋กœ ๋น›์„ ๋ฐ›์€ ๋ถ€๋ถ„ ๋˜๋Š” ๋ฐ›์ง€ ์•Š์€ ๋ถ€๋ถ„์„ ์„ ํƒ์ ์œผ๋กœ ๋…น์—ฌ๋‚ด ํŒจํ„ด์„ ๋งŒ๋“ญ๋‹ˆ๋‹ค.
  4. ์‹๊ฐ(Etching): ๋‚จ์€ ํฌํ† ๋ ˆ์ง€์ŠคํŠธ๋ฅผ ๋ณดํ˜ธ๋ง‰ ์‚ผ์•„ ์•„๋ž˜์ธต ๋ง‰์„ ๊นŽ์•„๋ƒ…๋‹ˆ๋‹ค.
  5. ๋ฐ•๋ฆฌ(Stripping): ๋งˆ์ง€๋ง‰์œผ๋กœ ์ž„๋ฌด๋ฅผ ๋‹คํ•œ ํฌํ† ๋ ˆ์ง€์ŠคํŠธ๋ฅผ ์ œ๊ฑฐํ•˜๋ฉด ํšŒ๋กœ ํŒจํ„ด์ด ์™„์„ฑ๋ฉ๋‹ˆ๋‹ค.

ํฌํ† ๋ ˆ์ง€์ŠคํŠธ๋Š” ๋น›์„ ๋ฐ›์•˜์„ ๋•Œ ๋…น๋Š” ‘ํฌ์ง€ํ‹ฐ๋ธŒ(Positive) ํƒ€์ž…’๊ณผ, ๋ฐ˜๋Œ€๋กœ ๋‹จ๋‹จํ•˜๊ฒŒ ๊ตณ๋Š” ‘๋„ค๊ฑฐํ‹ฐ๋ธŒ(Negative) ํƒ€์ž…’์œผ๋กœ ๋‚˜๋‰˜์–ด์š”. ์ดˆ๊ธฐ์—๋Š” ๋„ค๊ฑฐํ‹ฐ๋ธŒ ํƒ€์ž…์ด ๋จผ์ € ๊ฐœ๋ฐœ๋˜์—ˆ์ง€๋งŒ, ๋น›์„ ๋ฐ›์•„ ๊ตณ๋Š” ๊ณผ์ •์—์„œ ๋ฏธ์„ธํ•˜๊ฒŒ ๋ถ€ํ’€์–ด ์˜ค๋ฅด๋Š” ํ˜„์ƒ์ด ์žˆ์—ˆ์–ด์š”. ์ด๊ฒŒ ์ดˆ๋ฏธ์„ธ ๊ณต์ •์—์„œ๋Š” ์ •๋ฐ€๋„๋ฅผ ๋–จ์–ด๋œจ๋ฆฌ๋Š” ์›์ธ์ด ๋์ฃ . ๋ฐ˜๋ฉด์— ํฌ์ง€ํ‹ฐ๋ธŒ ํƒ€์ž…์€ ๊ทธ๋Ÿฐ ๋ฌธ์ œ๊ฐ€ ์ ์–ด ํ›จ์”ฌ ๋” ์ •๋ฐ€ํ•œ ํŒจํ„ด์„ ๋งŒ๋“ค ์ˆ˜ ์žˆ๊ธฐ ๋•Œ๋ฌธ์— ์š”์ฆ˜์€ ๊ฑฐ์˜ ๋‹ค ํฌ์ง€ํ‹ฐ๋ธŒ ํƒ€์ž…์„ ์‚ฌ์šฉํ•œ๋‹ต๋‹ˆ๋‹ค.

 

์•„์ŠคํŒ”ํŠธ์—์„œ ์ตœ์ฒจ๋‹จ ์†Œ์žฌ๊นŒ์ง€: ํฌํ† ๋ ˆ์ง€์ŠคํŠธ์˜ ์—ญ์‚ฌ ๐Ÿ“œ

์ •๋ง ๋†€๋ž๊ฒŒ๋„, ์ด ๊ธฐ์ˆ ์˜ ์‹œ์ž‘์€ 1820๋…„๋Œ€ ํ”„๋ž‘์Šค์—์„œ ์‹œ์ž‘๋์–ด์š”. ๋ฐœ๋ช…๊ฐ€ ๋‹ˆ์„ธํฌ๋ฅด ๋‹ˆ์—ก์Šค๊ฐ€ ์•„์ŠคํŒ”ํŠธ์™€ ๋น„์Šทํ•œ ‘์œ ๋Œ€ ๋น„ํˆฌ๋งจ’์ด๋ผ๋Š” ๋ฌผ์งˆ์ด ๋น›์„ ๋ฐ›์œผ๋ฉด ๊ตณ๋Š” ์„ฑ์งˆ์„ ์ด์šฉํ•ด ์„ธ๊ณ„ ์ตœ์ดˆ์˜ ์‚ฌ์ง„์„ ๋งŒ๋“  ๊ฒƒ์ด ์‹œ์ดˆ์˜€์ฃ . ์ด ๊ธฐ์ˆ ์ด ๋ฐ˜๋„์ฒด์— ์ ์šฉ๋œ ๊ฑด 1950๋…„๋Œ€, ํŠธ๋žœ์ง€์Šคํ„ฐ๋ฅผ ๋ฐœ๋ช…ํ•œ ๋ฒจ ์—ฐ๊ตฌ์†Œ์˜ ์œŒ๋ฆฌ์—„ ์‡ผํด๋ฆฌ์˜ ์ œ์•ˆ ๋•๋ถ„์ด์—ˆ์Šต๋‹ˆ๋‹ค.

์ฒ˜์Œ์—๋Š” ์‚ฌ์ง„์šฉ ๊ฐ๊ด‘์žฌ๋ฅผ ์ผ์ง€๋งŒ, ๋ฐ˜๋„์ฒด ๊ณต์ •์˜ ๋…ํ•œ ํ™”ํ•™๋ฌผ์งˆ(๋ถˆ์‚ฐ ๋“ฑ)์„ ๊ฒฌ๋””์ง€ ๋ชปํ–ˆ์–ด์š”. ๊ทธ๋ž˜์„œ ์นด๋ฉ”๋ผ ํ•„๋ฆ„์œผ๋กœ ์œ ๋ช…ํ•œ ์ฝ”๋‹ฅ(Kodak)์ด ๋‚˜์„œ์„œ ๋‚ดํ™”ํ•™์„ฑ์ด ๊ฐ•ํ•œ ๋„ค๊ฑฐํ‹ฐ๋ธŒ ๋ ˆ์ง€์ŠคํŠธ ‘KPR’๊ณผ ์ ‘์ฐฉ๋ ฅ์„ ๋†’์ธ ‘KTFR’์„ ๊ฐœ๋ฐœํ–ˆ๊ณ , ์ด KTFR์ด 15๋…„ ๋„˜๊ฒŒ ์—…๊ณ„ ํ‘œ์ค€์œผ๋กœ ์ž๋ฆฌ ์žก์•˜์ฃ .

๐Ÿ’ก TOK์˜ ๊ฒฐ์ •์  ํ•œ ๋ฐฉ: OPR-800์˜ ์„ฑ๊ณต ๋น„ํ™”
ํ•˜์ง€๋งŒ ์ง„์งœ ํŒ๋„๋ฅผ ๋ฐ”๊พผ ๊ฑด ํฌ์ง€ํ‹ฐ๋ธŒ ๋ ˆ์ง€์ŠคํŠธ์˜ ๋“ฑ์žฅ์ด์—ˆ์Šต๋‹ˆ๋‹ค. ๋…์ผ์˜ ์ฒญ์‚ฌ์ง„ ๊ธฐ์ˆ ์—์„œ ์œ ๋ž˜ํ•œ ‘DNQ-Novolac’ ์‹œ์Šคํ…œ ๋•๋ถ„์— ํ›จ์”ฌ ์ •๋ฐ€ํ•œ ํšŒ๋กœ๋ฅผ ๊ทธ๋ฆด ์ˆ˜ ์žˆ๊ฒŒ ๋œ ๊ฒƒ์ด์ฃ . ์ด ๊ธฐ์ˆ ์€ ๋ฒจ ์—ฐ๊ตฌ์†Œ์™€ ๊ฐ™์€ ๋™๋„ค์— ์žˆ๋˜ ๋…์ผ ํšŒ์‚ฌ์˜ ๋ฏธ๊ตญ ์žํšŒ์‚ฌ๋ฅผ ํ†ตํ•ด ๋ฏธ๊ตญ ๋ฐ˜๋„์ฒด ์—…๊ณ„์— ์ „ํŒŒ๋˜์—ˆ๊ณ , 1970๋…„๋Œ€์—๋Š” ๋ฏธ๊ตญ/์œ ๋Ÿฝ ๊ธฐ์—…๋“ค์ด ์‹œ์žฅ์„ ์ฃผ๋„ํ–ˆ์Šต๋‹ˆ๋‹ค.

์ด๋•Œ TOK๋Š” ๋งค์šฐ ๋ฐœ ๋น ๋ฅด๊ฒŒ ์›€์ง์˜€์Šต๋‹ˆ๋‹ค. 1979๋…„, ๊ฒฐ์ •์ ์ธ ์ œํ’ˆ์ธ ‘OPR-800’์„ ์ถœ์‹œํ•ฉ๋‹ˆ๋‹ค. ์„ฑ๋Šฅ๋„ ๋›ฐ์–ด๋‚ฌ์ง€๋งŒ, ์ง„์งœ ์„ฑ๊ณต ๋น„๊ฒฐ์€ ๊ฐ€๊ฒฉ ๊ฒฝ์Ÿ๋ ฅ๊ณผ ์‚ฌ์šฉ ํ›„ ์›จ์ดํผ์— ์ž”๋ฅ˜๋ฌผ์ด ์ ๋‹ค๋Š” ์žฅ์ ์ด์—ˆ์Šต๋‹ˆ๋‹ค. ์ด๋Š” ๋‹น์‹œ ํญ๋ฐœ์ ์œผ๋กœ ์„ฑ์žฅํ•˜๋˜ ์ผ๋ณธ DRAM ํšŒ์‚ฌ๋“ค์˜ ์š”๊ตฌ์— ์™„๋ฒฝํ•˜๊ฒŒ ๋ถ€ํ•ฉํ–ˆ๊ณ , ๊ทธ ๊ฒฐ๊ณผ TOK๋Š” ์ผ๋ณธ ์‹œ์žฅ์˜ 80% ์ด์ƒ์„ ์žฅ์•…ํ•˜๋ฉฐ ๊ฑฐ์ธ์œผ๋กœ ์„ฑ์žฅํ•ฉ๋‹ˆ๋‹ค. 1980๋…„๋Œ€ ์ผ๋ณธ DRAM ์‹ ํ™”์˜ ๋ฐ‘๋ฐ”ํƒ•์—๋Š” ๋ฐ”๋กœ ์ด OPR-800์ด ์žˆ์—ˆ๋˜ ์…ˆ์ด์ฃ .

 

๋˜ ๋‹ค๋ฅธ ๊ฐ•์ž, JSR์˜ ๋“ฑ์žฅ๊ณผ ๊ธฐ์ˆ  ํ˜์‹  ๐Ÿš€

TOK๊ฐ€ ์‹œ์žฅ์„ ์ฃผ๋„ํ•˜๋˜ ๋•Œ, ๋˜ ๋‹ค๋ฅธ ๊ฐ•์ž๊ฐ€ ์กฐ์šฉํžˆ ๋“ฑ์žฅํ•ฉ๋‹ˆ๋‹ค. ๋ฐ”๋กœ ‘JSR’์ด์—์š”. ์›๋ž˜ ํƒ€์ด์–ด์šฉ ํ•ฉ์„ฑ๊ณ ๋ฌด๋ฅผ ๋งŒ๋“ค๋˜ ์ •๋ถ€ ์ฃผ๋„ ๊ธฐ์—…์ด์—ˆ๋Š”๋ฐ, ์˜ค์ผ ์‡ผํฌ๋กœ ์œ„๊ธฐ๋ฅผ ๋งž์ž ์ „์ž์žฌ๋ฃŒ๋กœ ๋ˆˆ์„ ๋Œ๋ฆฐ ๊ฑฐ์ฃ . JSR์˜ ์„ฑ๊ณต ์ „๋žต์€ ๋‹ฌ๋ž์Šต๋‹ˆ๋‹ค.

JSR์˜ ์„ฑ๊ณต ๋น„๊ฒฐ: ์˜คํ”ˆ ์ด๋…ธ๋ฒ ์ด์…˜๊ณผ ๊ธ€๋กœ๋ฒŒ ์ „๋žต

1990๋…„๋Œ€, DUV ์‹œ๋Œ€๋กœ์˜ ์ „ํ™˜๊ณผ ํ•จ๊ป˜ IBM์ด ๊ฐœ๋ฐœํ•œ ‘ํ™”ํ•™ ์ฆํญํ˜• ๋ ˆ์ง€์ŠคํŠธ(CAR)’๋Š” ๊ฒŒ์ž„ ์ฒด์ธ์ €์˜€์Šต๋‹ˆ๋‹ค. ํ•˜์ง€๋งŒ ์ด ๊ธฐ์ˆ ์€ ๋„ˆ๋ฌด ์˜ˆ๋ฏผํ•ด์„œ ์ƒ์šฉํ™”๊ฐ€ ์–ด๋ ค์› ๊ณ , IBM์€ ๊ธฐ์ˆ ์„ ๋…์ ํ•˜๋Š” ๋Œ€์‹  ‘์˜คํ”ˆ ์ด๋…ธ๋ฒ ์ด์…˜’์„ ์„ ํƒ, JSR, TOK ๋“ฑ๊ณผ ํ˜‘๋ ฅ์„ ๋ชจ์ƒ‰ํ•ฉ๋‹ˆ๋‹ค.

JSR์—๊ฒŒ ์ด๊ฒƒ์€ ๊ฒฐ์ •์  ๊ธฐํšŒ์˜€์Šต๋‹ˆ๋‹ค. ์ผ๋ณธ ๋ฐ˜๋„์ฒด ์‚ฐ์—…์ด ์ฃผ์ถคํ•˜๋˜ ์‹œ๊ธฐ, JSR์€ IBM๊ณผ์˜ ๊ธฐ์ˆ  ํ˜‘๋ ฅ์„ ํ†ตํ•ด ArF ํฌํ† ๋ ˆ์ง€์ŠคํŠธ ์ƒ์šฉํ™” ๊ฒฝ์Ÿ์—์„œ ์•ž์„œ ๋‚˜๊ฐˆ ๋ฐœํŒ์„ ๋งˆ๋ จํ–ˆ์Šต๋‹ˆ๋‹ค. ์ด ํ˜‘๋ ฅ์„ ๊ธฐ๋ฐ˜์œผ๋กœ JSR์€ ํฌํŠธํด๋ฆฌ์˜ค๋ฅผ EUV๊นŒ์ง€ ํ™•์žฅํ–ˆ๊ณ , ์‚ผ์„ฑ์ „์ž, ์ธํ…” ๋“ฑ ํ•ด์™ธ ์„ ๋„ ๊ธฐ์—…๋“ค์„ ๊ณ ๊ฐ์œผ๋กœ ํ™•๋ณดํ•˜๋ฉฐ ๊ธ‰์„ฑ์žฅํ–ˆ์Šต๋‹ˆ๋‹ค. ๊ทธ ๊ฒฐ๊ณผ 2000๋…„๋Œ€ ์ดˆ๋ฐ˜์—๋Š” ํ•ด์™ธ ๋งค์ถœ ๋น„์ค‘์ด 70%์— ์ด๋ฅผ ์ •๋„๋กœ ์™„๋ฒฝํ•œ ๊ธ€๋กœ๋ฒŒ ํ”Œ๋ ˆ์ด์–ด๋กœ ์ž๋ฆฌ ์žก์•˜์Šต๋‹ˆ๋‹ค. ๊ธฐ์ˆ  ํ˜‘๋ ฅ์„ ๋ฐœํŒ ์‚ผ์•„ ๊ณผ๊ฐํ•˜๊ฒŒ ๊ธ€๋กœ๋ฒŒ ์‹œ์žฅ์„ ๊ณต๋žตํ•œ ๊ฒƒ์ด JSR ์„ฑ๊ณต ์Šคํ† ๋ฆฌ์˜ ํ•ต์‹ฌ์ด์—ˆ์ฃ .

 

์ง€์ •ํ•™์˜ ์ค‘์‹ฌ์— ์„  ํฌํ† ๋ ˆ์ง€์ŠคํŠธ: 2019๋…„ ํ•œ์ผ ๋ฌด์—ญ ๋ถ„์Ÿ ๐ŸŒ

ํฌํ† ๋ ˆ์ง€์ŠคํŠธ์˜ ์ „๋žต์  ์ค‘์š”์„ฑ์ด ์ „ ์„ธ๊ณ„์— ๊ฐ์ธ๋œ ์‚ฌ๊ฑด์ด ์žˆ์—ˆ์ฃ . ๋ฐ”๋กœ 2019๋…„ 7์›”์— ์‹œ์ž‘๋œ ํ•œ์ผ ๋ฌด์—ญ ๋ถ„์Ÿ์ž…๋‹ˆ๋‹ค. ๋‹น์‹œ ์ƒํ™ฉ์„ ์ค‘๋ฆฝ์ ์ธ ์‹œ๊ฐ์—์„œ ๋‹ค์‹œ ํ•œ๋ฒˆ ์ž์„ธํžˆ ์งš์–ด๋ณด๊ฒ ์Šต๋‹ˆ๋‹ค.

์‚ฌํƒœ์˜ ๋ฐœ๋‹จ๊ณผ ์–‘์ธก์˜ ์ž…์žฅ

  • ์ผ๋ณธ์˜ ์กฐ์น˜: 2019๋…„ 7์›”, ์ผ๋ณธ ์ •๋ถ€๋Š” EUV์šฉ ํฌํ† ๋ ˆ์ง€์ŠคํŠธ, ๊ณ ์ˆœ๋„ ๋ถˆํ™”์ˆ˜์†Œ(HF), ํ”Œ๋ฃจ์˜ค๋ฆฐ ํด๋ฆฌ์ด๋ฏธ๋“œ(PI) 3๊ฐœ ํ’ˆ๋ชฉ์— ๋Œ€ํ•ด ํ•œ๊ตญ์œผ๋กœ์˜ ์ˆ˜์ถœ ์ ˆ์ฐจ๋ฅผ ๊ฐ•ํ™”ํ–ˆ์Šต๋‹ˆ๋‹ค.
  • ์ผ๋ณธ์˜ ๊ณต์‹ ์ž…์žฅ: ์ด๋Ÿฌํ•œ ์ „๋žต ๋ฌผ์ž๋“ค์ด ๊ตฐ์‚ฌ์  ๋ชฉ์ ์œผ๋กœ ์ „์šฉ๋  ๊ฐ€๋Šฅ์„ฑ์— ๋Œ€ํ•œ ์•ˆ๋ณด์ƒ์˜ ์šฐ๋ ค์™€, ํ•œ๊ตญ์˜ ์ˆ˜์ถœ ๊ด€๋ฆฌ ์‹œ์Šคํ…œ์ด ๋ฏธํกํ•˜๋‹ค๋Š” ์ ์„ ์ด์œ ๋กœ ๋“ค์—ˆ์Šต๋‹ˆ๋‹ค.
  • ํ•œ๊ตญ์˜ ๊ณต์‹ ์ž…์žฅ: 2018๋…„ ํ•œ๊ตญ ๋Œ€๋ฒ•์›์˜ ๊ฐ•์ œ์ง•์šฉ ํ”ผํ•ด์ž ๋ฐฐ์ƒ ํŒ๊ฒฐ์— ๋Œ€ํ•œ ์‚ฌ์‹ค์ƒ์˜ ‘๊ฒฝ์ œ ๋ณด๋ณต’ ์กฐ์น˜๋ผ๊ณ  ๊ทœ์ •ํ•˜๋ฉฐ ๊ฐ•ํ•˜๊ฒŒ ๋ฐ˜๋ฐœํ–ˆ์Šต๋‹ˆ๋‹ค.

๊ทธ๋ ‡๋‹ค๋ฉด ์ด ์กฐ์น˜๋Š” ์‹ค์ œ ๋ฐ˜๋„์ฒด ์‚ฐ์—…์— ์–ด๋А ์ •๋„์˜ ์˜ํ–ฅ์„ ๋ฏธ์ณค์„๊นŒ์š”? ๊ฒฐ๋ก ๋ถ€ํ„ฐ ๋งํ•˜๋ฉด, ์šฐ๋ คํ–ˆ๋˜ ์ตœ์•…์˜ ‘์ƒ์‚ฐ ๋ผ์ธ ์ค‘๋‹จ’ ์‚ฌํƒœ๋Š” ์ผ์–ด๋‚˜์ง€ ์•Š์•˜์Šต๋‹ˆ๋‹ค.

๐Ÿ’ก ์‹ค์ œ ์˜ํ–ฅ์ด ์ œํ•œ์ ์ด์—ˆ๋˜ ์ด์œ 
๊ทœ์ œ ๋Œ€์ƒ์ด ๋‹น์‹œ ์ตœ์ฒจ๋‹จ ๊ธฐ์ˆ ์ด์—ˆ๋˜ EUV ๊ณต์ •์šฉ ํฌํ† ๋ ˆ์ง€์ŠคํŠธ์— ํ•œ์ •๋˜์—ˆ๊ธฐ ๋•Œ๋ฌธ์ž…๋‹ˆ๋‹ค. ๋‹น์‹œ ์‚ผ์„ฑ์ „์ž๋‚˜ SKํ•˜์ด๋‹‰์Šค ๋ชจ๋‘ EUV ๊ณต์ •์„ ๋ง‰ ๋„์ž…ํ•˜๊ฑฐ๋‚˜ ํ…Œ์ŠคํŠธํ•˜๋Š” ์ดˆ๊ธฐ ๋‹จ๊ณ„์—ฌ์„œ, ๋‹น์žฅ ๋Œ€๋Ÿ‰ ์ƒ์‚ฐ์— ์ฐจ์งˆ์ด ์ƒ๊ธธ ์ •๋„์˜ ๋ฌผ๋Ÿ‰์ด ํ•„์š”ํ•˜์ง€๋Š” ์•Š์•˜์Šต๋‹ˆ๋‹ค. ๋˜ํ•œ, JSR๊ณผ ๊ฐ™์€ ๊ณต๊ธ‰์‚ฌ๋Š” ๋ฒจ๊ธฐ์— IMEC๊ณผ์˜ ํ•ฉ์ž‘ ๋ฒ•์ธ์„ ํ†ตํ•œ ์šฐํšŒ ๊ณต๊ธ‰ ๊ฒฝ๋กœ๋ฅผ ๊ฐ€์ง€๊ณ  ์žˆ์–ด ๊ธ€๋กœ๋ฒŒ ๊ณต๊ธ‰๋ง์ด ์™„์ „ํžˆ ๋งˆ๋น„๋˜์ง€๋Š” ์•Š์•˜์Šต๋‹ˆ๋‹ค. ์ด ์กฐ์น˜๋Š” ๊ฒฐ๊ตญ 2023๋…„ ํ•œ์ผ ๊ด€๊ณ„๊ฐ€ ๊ฐœ์„ ๋˜๋ฉด์„œ ํ•ด์ œ๋˜์—ˆ์Šต๋‹ˆ๋‹ค.

 

์ผ๋ณธ์€ ์–ด๋–ป๊ฒŒ ์‹œ์žฅ์„ ์ง€๋ฐฐํ•˜๊ฒŒ ๋์„๊นŒ? ๐Ÿ‡ฏ๐Ÿ‡ต

๋ถ„์Ÿ์€ ์ผ๋‹จ๋ฝ๋˜์—ˆ์ง€๋งŒ ๊ทผ๋ณธ์ ์ธ ์งˆ๋ฌธ์€ ๋‚จ์Šต๋‹ˆ๋‹ค. EUV ์‹œ๋Œ€์—๋„ ์ผ๋ณธ์€ ์–ด๋–ป๊ฒŒ ํฌํ† ๋ ˆ์ง€์ŠคํŠธ ์‹œ์žฅ์˜ ์ ˆ๋Œ€ ๊ฐ•์ž๋กœ ๊ตฐ๋ฆผํ•˜๊ณ  ์žˆ์„๊นŒ์š”? ๊ทธ ๋น„๊ฒฐ์€ ๋‹จ์ˆœํžˆ ๊ธฐ์ˆ ๋ ฅ ํ•˜๋‚˜๋งŒ์œผ๋กœ ์„ค๋ช…ํ•  ์ˆ˜ ์—†๋Š”, ๋‹ค์„ฏ ๊ฐ€์ง€ ๋ณตํ•ฉ์ ์ธ ์š”์ธ์— ์žˆ์Šต๋‹ˆ๋‹ค.

์ผ๋ณธ ํฌํ† ๋ ˆ์ง€์ŠคํŠธ ์‚ฐ์—…์˜ 5๊ฐ€์ง€ ์„ฑ๊ณต ๋ฐฉ์ •์‹
1. ์ œ์กฐ ํด๋Ÿฌ์Šคํ„ฐ์˜ ํž˜ TOK, JSR ๋“ฑ ์ฃผ์š” ๊ธฐ์—…๋“ค์ด ๊ฐ€๋‚˜๊ฐ€์™€ํ˜„ ๋“ฑ ์ˆ˜๋„๊ถŒ์— ๋ฐ€์ง‘ํ•ด ์ธ์žฌ, ๊ธฐ์ˆ , ์ •๋ณด ๊ต๋ฅ˜๋ฅผ ํ†ตํ•ด ํ˜์‹ ์„ ๊ฐ€์†ํ™”ํ–ˆ์Šต๋‹ˆ๋‹ค. ๊ฒฝ์Ÿ๊ณผ ํ˜‘๋ ฅ์ด ๊ณต์กดํ•˜๋ฉฐ ‘์–ด๊นจ๋„ˆ๋จธ ๋ฐฐ์šฐ๊ธฐ’๊ฐ€ ๊ฐ€๋Šฅํ•œ ํ™˜๊ฒฝ์ž…๋‹ˆ๋‹ค.
2. ์˜คํ”ˆ ์ด๋…ธ๋ฒ ์ด์…˜ ์™ธ๋ถ€ ๊ธฐ์ˆ (IBM์˜ CAR)์„ ์ ๊ทน์ ์œผ๋กœ ๋ฐ›์•„๋“ค์—ฌ ๋‹จ์ˆœ ์ฑ„ํƒ์„ ๋„˜์–ด ๊ณต๋™ ๊ฐœ๋ฐœ ํŒŒํŠธ๋„ˆ๋กœ ๋ฐœ์ „ํ•˜๋ฉฐ ๊ธฐ์ˆ ์„ ๋‚ด์žฌํ™”ํ–ˆ์Šต๋‹ˆ๋‹ค.
3. ๊ณ ๊ฐ ๋ฐ€์ฐฉ ๊ณต๋™๊ฐœ๋ฐœ ์ตœ์ฒจ๋‹จ ํฌํ† ๋ ˆ์ง€์ŠคํŠธ๋Š” ๊ธฐ์„ฑํ’ˆ์ด ์•„๋‹™๋‹ˆ๋‹ค. ์‚ผ์„ฑ, TSMC ๋“ฑ ๊ณ ๊ฐ์‚ฌ์˜ ํŠน์ • ๊ณต์ • ๋ผ์ธ์— ๋งž์ถฐ ํ•จ๊ป˜ ๊ฐœ๋ฐœํ•˜๋Š” ‘๋งž์ถคํ˜• ์†”๋ฃจ์…˜’์œผ๋กœ, ํ•œ๋ฒˆ ์ ์šฉ๋˜๋ฉด ๊ต์ฒด๊ฐ€ ๊ฑฐ์˜ ๋ถˆ๊ฐ€๋Šฅํ•œ ๊ฐ•๋ ฅํ•œ ์ง„์ž… ์žฅ๋ฒฝ์„ ๋งŒ๋“ญ๋‹ˆ๋‹ค.
4. ์žฅ๊ธฐ์  ๊ด€๊ณ„ ์ค‘์‹œ ๋ฌธํ™” ๋‹จ๊ธฐ ์ˆ˜์ต๋ณด๋‹ค ๊ณ ๊ฐ๊ณผ์˜ ์‹ ๋ขฐ์™€ ์ง€์† ๊ฐ€๋Šฅํ•œ ํ˜‘๋ ฅ์„ ์šฐ์„ ์‹œํ•˜๋Š” ๋ฌธํ™”๊ฐ€ ์žฅ๊ธฐ์ ์ธ ๊ฒฝ์Ÿ๋ ฅ๊ณผ ๊ณ ๊ฐ ์ถฉ์„ฑ๋„๋ฅผ ํ™•๋ณดํ•˜๋Š” ๋น„๊ฒฐ์ด ๋˜์—ˆ์Šต๋‹ˆ๋‹ค.
5. ๊ทนํ•œ์˜ ํ’ˆ์งˆ ๊ด€๋ฆฌ ์˜ฌ๋ฆผํ”ฝ ๊ทœ๊ฒฉ ์ˆ˜์˜์žฅ 2๊ฐœ ๋ถ„๋Ÿ‰์˜ ๋ฌผ์— ๋ถˆ์ˆœ๋ฌผ ๋‹จ ํ•œ ๋ฐฉ์šธ๋„ ์šฉ๋‚ฉํ•˜์ง€ ์•Š๋Š” ์ˆ˜์ค€์˜ ์ˆœ๋„ ๊ด€๋ฆฌ๊ฐ€ ํ•„์š”ํ•ฉ๋‹ˆ๋‹ค. ์ˆ˜์‹ญ ๋…„๊ฐ„ ์ถ•์ ๋œ ์žฅ์ธ๊ธ‰ ๋…ธํ•˜์šฐ๋Š” ๋‹จ๊ธฐ๊ฐ„์— ๋”ฐ๋ผ์žก๊ธฐ ๋ถˆ๊ฐ€๋Šฅํ•œ ์˜์—ญ์ž…๋‹ˆ๋‹ค.
์ฃผ์˜ํ•˜์„ธ์š”! ์‹œ์žฅ์˜ ์—ญ์„ค: ์ž‘์ง€๋งŒ ์น˜๋ช…์ ์ด๋‹ค
์ด๋ ‡๊ฒŒ ์ „๋žต์ ์œผ๋กœ ์ค‘์š”ํ•˜์ง€๋งŒ, ํฌํ† ๋ ˆ์ง€์ŠคํŠธ ์‹œ์žฅ์€ ๋ฐ˜๋„์ฒด ์ „์ฒด์— ๋น„ํ•˜๋ฉด ๊ทœ๋ชจ๊ฐ€ ๋งค์šฐ ์ž‘๊ณ (์•ฝ 20์–ต ๋‹ฌ๋Ÿฌ), ์˜์—… ์ด์ต๋ฅ ๋„ ๋†’์ง€ ์•Š์•„์š”. (JSR ์•ฝ 3.8%, TOK ์•ฝ 7.8%) ์ด๋Š” ‘๊ณ ์œ„ํ—˜ ์ €์ˆ˜์ต’ ๊ตฌ์กฐ๋กœ, ์™ธ๋ถ€์˜ ์ธ์ˆ˜ํ•ฉ๋ณ‘ ์‹œ๋„์— ์ทจ์•ฝํ•  ์ˆ˜ ์žˆ๋‹ค๋Š” ์˜๋ฏธ์ด๊ธฐ๋„ ํ•ฉ๋‹ˆ๋‹ค. JSR ์ „ ํšŒ์žฅ์ด ๋†๋‹ด ์‚ผ์•„ ‘์ผ๋ณธ ๋ผ๋ฉ˜ ์‹œ์žฅ๋ณด๋‹ค ์ž‘๋‹ค’๊ณ  ํ–ˆ์„ ์ •๋„๋‹ˆ๊นŒ์š”.

 

๊ตญ๊ฐ€ ์ž์‚ฐ์ด ๋œ ๊ธฐ์ˆ : JSR ์ธ์ˆ˜ ์‚ฌํƒœ์˜ ์˜๋ฏธ ๐Ÿข

์ด๋Ÿฐ ๊ตฌ์กฐ์  ์ทจ์•ฝ์„ฑ์€ ๊ฒฐ๊ตญ ํ˜„์‹ค์ด ๋˜์—ˆ์Šต๋‹ˆ๋‹ค. 2022๋…„ ๋…์ผ ๋จธํฌ์˜ JSR ์ธ์ˆ˜ ์‹œ๋„๊ฐ€ ๋ฌด์‚ฐ๋œ ์ดํ›„์—๋„ ์‚ฌ๋ชจํŽ€๋“œ๋“ค์˜ ๊ฒฝ์˜๊ถŒ ์œ„ํ˜‘์ด ๊ณ„์†๋˜์ž, ์ผ๋ณธ ์ •๋ถ€๋Š” 2023๋…„ ์•„์ฃผ ์ด๋ก€์ ์ธ ๊ฒฐ์ •์„ ๋‚ด๋ฆฝ๋‹ˆ๋‹ค.

๋ฐ”๋กœ ์ผ๋ณธ ์ •์ฑ…ํŽ€๋“œ(JIC)๊ฐ€ ์•ฝ 9์กฐ ์›์„ ํˆฌ์ž…ํ•ด ์šฐ๋Ÿ‰ ๋ฏผ๊ฐ„ ๊ธฐ์—…์ด๋˜ JSR์„ ์ธ์ˆ˜ํ•˜๊ณ  ๋น„์ƒ์žฅ ํšŒ์‚ฌ๋กœ ์ „ํ™˜ํ•˜๊ธฐ๋กœ ํ•œ ๊ฒƒ์ž…๋‹ˆ๋‹ค. ์ด๋Š” ๋ถ€์‹ค ๊ธฐ์—… ๊ตฌ์ œ๊ฐ€ ์•„๋‹Œ, ๊ตญ๊ฐ€ ์•ˆ๋ณด์™€ ๊ฒฝ์ œ ์ฃผ๊ถŒ์— ์ง๊ฒฐ๋œ ํ•ต์‹ฌ ๊ธฐ์ˆ ์„ ์™ธ๋ถ€ ์œ„ํ˜‘์œผ๋กœ๋ถ€ํ„ฐ ๋ณดํ˜ธํ•˜๋ ค๋Š” ๊ฐ•๋ ฅํ•œ ์˜์ง€์˜ ํ‘œํ˜„์ด์—ˆ์Šต๋‹ˆ๋‹ค.

๐Ÿ’ก

ํฌํ† ๋ ˆ์ง€์ŠคํŠธ ์ด์•ผ๊ธฐ ํ•ต์‹ฌ ์š”์•ฝ

์‹œ์ž‘์€ ์‚ฌ์ง„ ๊ธฐ์ˆ : 19์„ธ๊ธฐ ์•„์ŠคํŒ”ํŠธ ์‚ฌ์ง„์—์„œ ์‹œ์ž‘ํ•ด ๋ฐ˜๋„์ฒด ํ•ต์‹ฌ ์†Œ์žฌ๋กœ ๋ฐœ์ „ํ–ˆ์Šต๋‹ˆ๋‹ค.
์ผ๋ณธ์˜ ์ง€๋ฐฐ ์ „๋žต: ๋‹จ์ˆœ ๊ธฐ์ˆ ๋ ฅ์„ ๋„˜์–ด ํด๋Ÿฌ์Šคํ„ฐ, ์˜คํ”ˆ ์ด๋…ธ๋ฒ ์ด์…˜, ๊ณ ๊ฐ ๋ฐ€์ฐฉ ๊ฐœ๋ฐœ์ด ํ•ต์‹ฌ์ด์—ˆ์Šต๋‹ˆ๋‹ค.
์—ญ์„ค์  ์‚ฐ์—… ๊ตฌ์กฐ:
‘๋‚ฎ์€ ์ˆ˜์ต์„ฑ + ๋†’์€ ๊ธฐ์ˆ  ์žฅ๋ฒฝ’์ด ์™ธ๋ถ€ ์œ„ํ˜‘์— ์ทจ์•ฝํ•˜๊ฒŒ ๋งŒ๋“ค์—ˆ์Šต๋‹ˆ๋‹ค.
๊ธฐ์ˆ  ์•ˆ๋ณด์˜ ์‹œ๋Œ€: ์ผ๋ณธ ์ •๋ถ€์˜ JSR ์ธ์ˆ˜๋Š” ์ž‘์€ ๋ณ‘ ์† ์•ก์ฒด๊ฐ€ ๊ตญ๊ฐ€ ์ „๋žต ์ž์‚ฐ์ด ๋˜์—ˆ์Œ์„ ๋ณด์—ฌ์ค๋‹ˆ๋‹ค.

 

์ž์ฃผ ๋ฌป๋Š” ์งˆ๋ฌธ ❓

Q: ์ผ๋ณธ ํฌํ† ๋ ˆ์ง€์ŠคํŠธ ํด๋Ÿฌ์Šคํ„ฐ์˜ ๊ตฌ์ฒด์ ์ธ ์ธ์žฌ ๊ต๋ฅ˜๋Š” ์–ด๋–ป๊ฒŒ ์ด๋ฃจ์–ด์ง€๋‚˜์š”?

์ผ๋ณธ ํฌํ† ๋ ˆ์ง€์ŠคํŠธ ์‚ฐ์—…์˜ ์ธ์žฌ ๊ต๋ฅ˜๋Š” ‘์˜คํ”ˆ ์ด๋…ธ๋ฒ ์ด์…˜ ์ƒํƒœ๊ณ„’ ๊ตฌ์ถ•์„ ์ค‘์‹ฌ์œผ๋กœ ์ด๋ฃจ์–ด์ง‘๋‹ˆ๋‹ค. ํŠน์ • ์ง€์—ญ์— ๋ฌถ์ด๊ธฐ๋ณด๋‹ค๋Š” ๊ธ€๋กœ๋ฒŒ ๊ฑฐ์ ์„ ์ ๊ทน์ ์œผ๋กœ ํ™œ์šฉํ•˜๋Š” ๊ฒƒ์ด ํŠน์ง•์ž…๋‹ˆ๋‹ค.

1. Albany NanoTech Complex ์ค‘์‹ฌ์˜ ๊ธ€๋กœ๋ฒŒ ํ˜‘๋ ฅ: Rapidus์˜ ๊ณผํ•™์ž์™€ ์—”์ง€๋‹ˆ์–ด๋“ค์€ ๋‰ด์š•์˜ Albany NanoTech Complex์—์„œ IBM, ์‚ผ์„ฑ์ „์ž, JSR ๋“ฑ ๊ธ€๋กœ๋ฒŒ ๊ธฐ์—… ๋ฐ ๋Œ€ํ•™๋“ค๊ณผ ํ•จ๊ป˜ ์ฐจ์„ธ๋Œ€ ๊ธฐ์ˆ ์„ ๊ณต๋™ ์—ฐ๊ตฌํ•ฉ๋‹ˆ๋‹ค.

2. Rapidus-IBM ํŒŒํŠธ๋„ˆ์‹ญ: Rapidus๋Š” 100๋ช… ์ด์ƒ์˜ ์—”์ง€๋‹ˆ์–ด๋ฅผ IBM ์‹œ์„ค์— ํŒŒ๊ฒฌํ•ด 2nm ๊ณต์ •์˜ ํ•ต์‹ฌ์ธ GAA ๊ธฐ์ˆ ์„ ์Šต๋“ํ•˜๊ณ  ์žˆ์œผ๋ฉฐ, ์ผ๋ณธ ๋‚ด ๋ฒ ํ…Œ๋ž‘ ๋ฐ˜๋„์ฒด ์—”์ง€๋‹ˆ์–ด๋„ ์ ๊ทน์ ์œผ๋กœ ์˜์ž…ํ•˜๊ณ  ์žˆ์Šต๋‹ˆ๋‹ค.

3. ๋ฒจ๊ธฐ์— IMEC๊ณผ์˜ ์—ฐ๊ตฌ ํ˜‘๋ ฅ: ๋ฒจ๊ธฐ์—์˜ ์„ธ๊ณ„์ ์ธ ๋ฐ˜๋„์ฒด ์—ฐ๊ตฌ ํ—ˆ๋ธŒ IMEC๊ณผ์˜ ํ˜‘๋ ฅ์„ ํ†ตํ•ด ๊ตญ์ œ์ ์ธ ์˜คํ”ˆ ์ด๋…ธ๋ฒ ์ด์…˜ ์—ฐ๊ตฌ ๊ฑฐ์ ์„ ํ™œ์šฉํ•˜๊ณ  ์žˆ์Šต๋‹ˆ๋‹ค.

Q: ํ•œ๊ตญ ๋ฐ˜๋„์ฒด ์†Œ์žฌ ๋ถ„์•ผ์—์„œ ์„ฑ๊ณต์ ์ธ B2B ๊ณต๋™๊ฐœ๋ฐœ ์‚ฌ๋ก€๊ฐ€ ์žˆ๋‚˜์š”?

๋„ค, ๊ฐ€์žฅ ๋Œ€ํ‘œ์ ์ธ ์„ฑ๊ณต ์‚ฌ๋ก€๋Š” ๋™์ง„์Ž„๋ฏธ์ผ๊ณผ ์‚ผ์„ฑ์ „์ž์˜ EUV ํฌํ† ๋ ˆ์ง€์ŠคํŠธ ๊ณต๋™๊ฐœ๋ฐœ์ž…๋‹ˆ๋‹ค.

1. ๊ตญ์‚ฐํ™” ์„ฑ๊ณต: 2019๋…„ ์ผ๋ณธ ์ˆ˜์ถœ ๊ทœ์ œ 3๋Œ€ ํ’ˆ๋ชฉ ์ค‘ ํ•˜๋‚˜์˜€๋˜ EUV ํฌํ† ๋ ˆ์ง€์ŠคํŠธ ๊ฐœ๋ฐœ์— ์„ฑ๊ณตํ•˜๋ฉฐ ๊ธฐ์ˆ  ์ž๋ฆฝ์˜ ์ค‘์š”ํ•œ ์ด์ •ํ‘œ๋ฅผ ์„ธ์› ์Šต๋‹ˆ๋‹ค.

2. ๋น ๋ฅธ ์–‘์‚ฐ ์ ์šฉ: ์‚ผ์„ฑ์ „์ž๋Š” ์‹ ๋ขฐ์„ฑ ์‹œํ—˜ ํ†ต๊ณผ 1๋…„์ด ์ฑ„ ๋˜์ง€ ์•Š์€ ์‹œ์ ์— ๋™์ง„์Ž„๋ฏธ์ผ์˜ EUV PR์„ ์‹ค์ œ ์–‘์‚ฐ ๋ผ์ธ์— ์ ์šฉํ•˜๋ฉฐ ๊ธด๋ฐ€ํ•œ ํ˜‘๋ ฅ์˜ ์„ฑ๊ณผ๋ฅผ ๋ณด์—ฌ์ฃผ์—ˆ์Šต๋‹ˆ๋‹ค.

3. ์ธํ”„๋ผ์™€ ๊ธ€๋กœ๋ฒŒ ํ˜‘๋ ฅ: ๋™์ง„์Ž„๋ฏธ์ผ์€ ์ž์ฒด ๋…ธ๊ด‘ ์žฅ๋น„๋ฅผ ๊ตฌ์ถ•ํ•˜๊ณ  ๋ฒจ๊ธฐ์— IMEC๊ณผ๋„ ํ˜‘๋ ฅ ๊ด€๊ณ„๋ฅผ ๋งบ๋Š” ๋“ฑ ๊ธฐ์ˆ  ๊ฐœ๋ฐœ์„ ์œ„ํ•œ ๊ณผ๊ฐํ•œ ํˆฌ์ž๋ฅผ ์ง„ํ–‰ํ–ˆ์Šต๋‹ˆ๋‹ค. ์ด๋ฅผ ๋ฐ”ํƒ•์œผ๋กœ 3D ๋‚ธ๋“œํ”Œ๋ž˜์‹œ์šฉ PR ์‹œ์žฅ์—์„œ๋Š” ์ ์œ ์œจ 35% ์ด์ƒ์œผ๋กœ ์„ธ๊ณ„ 1์œ„๋ฅผ ๋‹ฌ์„ฑํ–ˆ์Šต๋‹ˆ๋‹ค.

Q: ์ผ๋ณธ์˜ ์˜คํ”ˆ ์ด๋…ธ๋ฒ ์ด์…˜ ๋ชจ๋ธ์„ ํ•œ๊ตญ ์ƒํ™ฉ์— ๋งž๊ฒŒ ์ ์šฉํ•˜๋Š” ๋ฐฉ์•ˆ์€ ๋ฌด์—‡์ธ๊ฐ€์š”?

[์ผ๋ณธ์˜ ์˜คํ”ˆ ์ด๋…ธ๋ฒ ์ด์…˜ ๋ชจ๋ธ ํŠน์ง•]

1. ์ปจ์†Œ์‹œ์—„ ๊ธฐ๋ฐ˜ ํ˜‘๋ ฅ: ‘Rapidus’๋Š” 2022๋…„ 8์›” ๋„์š”ํƒ€, ์†Œ๋‹ˆ ๋“ฑ 8๊ฐœ ์ฃผ์š” ๊ธฐ์—…์˜ ์ง€์›์œผ๋กœ ์„ค๋ฆฝ๋˜์–ด 2027๋…„๊นŒ์ง€ 2nm ๊ณต์ • ๊ฐœ๋ฐœ์„ ๋ชฉํ‘œ๋กœ ํ•ฉ๋‹ˆ๋‹ค. ์ด๋Š” ๊ฐœ๋ณ„ ๊ธฐ์—…์„ ๋„˜์–ด์„  ๊ตญ๊ฐ€์  ํ˜‘๋ ฅ ๋ชจ๋ธ์˜ ๋Œ€ํ‘œ์  ์‚ฌ๋ก€์ž…๋‹ˆ๋‹ค.

2. ์ •๋ถ€-๋ฏผ๊ฐ„ ํŒŒํŠธ๋„ˆ์‹ญ: ์ผ๋ณธ ์ •๋ถ€๋Š” 2021๋…„๋ถ€ํ„ฐ ๋Œ€๊ทœ๋ชจ ๋ณด์กฐ๊ธˆ์„ ํˆฌ์ž…ํ•ด TSMC, ๋งˆ์ดํฌ๋ก  ๋“ฑ ๊ธ€๋กœ๋ฒŒ ๊ธฐ์—…์„ ์œ ์น˜ํ•˜๊ณ , ํ‚ค์˜ฅ์‹œ์•„ ๋“ฑ ์ž๊ตญ ๊ธฐ์—…๋„ ์ง€์›ํ•˜๋ฉฐ ์ƒ์‚ฐ ๊ธฐ๋ฐ˜์„ ๋น ๋ฅด๊ฒŒ ๋ณต์›ํ•˜๊ณ  ์žˆ์Šต๋‹ˆ๋‹ค.

[ํ•œ๊ตญ ์ ์šฉ ๋ฐฉ์•ˆ]

1. ๊ตญ๊ฐ€ ์ฐจ์›์˜ ์ „๋žต์  ์ ‘๊ทผ: ๋ฐ˜๋„์ฒด ์‚ฐ์—…์„ ‘์ƒ์กด ์ „๋žต’์œผ๋กœ ์ธ์‹ํ•˜๊ณ , ํˆฌ์ž ์„ธ์•ก๊ณต์ œ ์ค‘์‹ฌ์˜ ๋‹จ๊ธฐ ํ˜œํƒ์„ ๋„˜์–ด ๋ณด์กฐ๊ธˆ·๋Œ€์ถœ·์ธํ”„๋ผ ๋“ฑ ์‹คํšจ์„ฑ ์žˆ๋Š” ์ค‘์žฅ๊ธฐ ์žฌ์ • ์ง€์› ์ฒด๊ณ„๋ฅผ ๋งˆ๋ จํ•ด์•ผ ํ•ฉ๋‹ˆ๋‹ค.

2. ๊ฐœ๋ฐฉํ˜• ํ˜์‹  ํ™œ์„ฑํ™”: ์†Œ์žฌ·๋ถ€ํ’ˆ·์žฅ๋น„(์†Œ๋ถ€์žฅ) ๊ตญ์‚ฐํ™”๋ฅผ ์œ„ํ•ด ์™ธ๊ตญ ์„ ๋„๊ธฐ์—…์„ ์••๋„ํ•  ๋ฏผ๊ฐ„๊ธฐ์—… ์ฐจ์›์˜ ํ’ˆ์งˆ ๊ฐ•ํ™”๊ฐ€ ์ ˆ์‹คํ•˜๋ฉฐ, ๊ฐœ๋ฐฉํ˜• ํ˜์‹ ์„ ํ†ตํ•ด ์™ธ๋ถ€ ์ •์ฑ…์— ํ”๋“ค๋ฆฌ์ง€ ์•Š๋Š” ๊ธฐ์ˆ ๋ ฅ์„ ํ™•๋ณดํ•˜๋Š” ๊ณ„๊ธฐ๋กœ ์‚ผ์•„์•ผ ํ•ฉ๋‹ˆ๋‹ค.

3. ํ•œ๊ตญํ˜• CREATE ๋ชจ๋ธ: ์Šคํƒ€ํŠธ์—…์˜ ํ˜์‹ ๊ณผ ๋Œ€๊ธฐ์—…์˜ ๊ฒฝ์Ÿ๋ ฅ์ด ์‹œ๋„ˆ์ง€๋ฅผ ๋‚ด๋Š” ์˜คํ”ˆ ์ด๋…ธ๋ฒ ์ด์…˜ ์„ ๋„๊ตญ์œผ๋กœ ๋„์•ฝํ•˜๊ธฐ ์œ„ํ•ด PoC(๊ธฐ์ˆ ์‹ค์ฆ) ์ž๊ธˆ์ง€์› ๋ฐ ๋งค์นญํŽ€๋“œ ํ™•๋Œ€, ๋”œ ์†Œ์‹ฑ ๊ธฐํšŒ ํ™•๋Œ€ ๋“ฑ์˜ ์ •์ฑ…์ด ์ œ์•ˆ๋ฉ๋‹ˆ๋‹ค.

์˜ค๋Š˜ ์ด์•ผ๊ธฐ๋Š” ์—ฌ๊ธฐ๊นŒ์ง€์ž…๋‹ˆ๋‹ค. ์ž‘์€ ๋ณ‘ ์† ์•ก์ฒด๊ฐ€ ๋งŒ๋“ค์–ด๋‚ธ ๊ธ€๋กœ๋ฒŒ ์ง€์ •ํ•™, ์ •๋ง ํฅ๋ฏธ๋กญ์ง€ ์•Š๋‚˜์š”? ์•ž์œผ๋กœ JSR ์‚ฌ๋ก€์ฒ˜๋Ÿผ ์‹œ์žฅ ๊ทœ๋ชจ๋Š” ์ž‘์ง€๋งŒ ์ „๋žต์  ๊ฐ€์น˜๊ฐ€ ํฐ ๋ถ„์•ผ๋“ค์ด ์–ด๋–ป๊ฒŒ ๋ณ€ํ•ด๊ฐˆ์ง€ ์ง€์ผœ๋ณด๋Š” ๊ฒƒ๋„ ์žฌ๋ฏธ์žˆ๋Š” ๊ด€์ „ ํฌ์ธํŠธ๊ฐ€ ๋  ๊ฒƒ ๊ฐ™์Šต๋‹ˆ๋‹ค. ๋” ๊ถ๊ธˆํ•œ ์ ์ด ์žˆ๋‹ค๋ฉด ๋Œ“๊ธ€๋กœ ๋ฌผ์–ด๋ด์ฃผ์„ธ์š”~ ๐Ÿ˜Š

The Key to HBM Performance: How Hybrid Bonding Will Change Semiconductors

 

With HBM4 and the AI era upon us, why is everyone suddenly talking about ‘hybrid bonding?’

We’ll break down everything you need to know about this revolutionary packaging technology that gets rid of solder balls—from its core principles to the fierce nanometer-scale challenges, its difficult path to HBM integration, and what it means for the future.

Recently, the AI semiconductor market heated up once again with SK Hynix's announcement that they’ve successfully developed and started mass production of HBM4. The news had experts and investors focused on a single question: ‘Did they actually use the so-called “dream technology,” hybrid bonding, in this version of HBM4?’

The short answer is, not yet. It appears that the initial production of HBM4 will use an advanced version of existing technology (MR-MUF), while hybrid bonding is still being developed as a ‘key future technology’ for ultra-high-stack HBM with 16 or more layers, or for the next generation of memory. However, hybrid bonding has moved beyond being just an option; it's now a critical turning point in the semiconductor packaging race.

My background is in mechanical engineering, but I’ve also studied law and worked on a master's in AI computing, handling numerous patents in the memory semiconductor industry. Through this, I’ve come to a firm belief: ‘The more complex the technology, the more crucial it is to explain it in a way that more people can understand.’ This article is my attempt to build a small bridge between the technology and the market.

 

1. Why the Sudden Focus on Advanced Packaging?

The game of semiconductor performance is changing. The competition is no longer just about how finely you can etch circuits inside a chip. The focus is shifting to ‘how well you can connect and stack’ those chips—in other words, packaging.

The biggest reason for this shift is that ‘Moore's Law’ isn't what it used to be. The cost and technical difficulty of making circuits smaller have skyrocketed. So, it's now more efficient, both in terms of performance and cost, to create smaller, specialized chips called ‘chiplets’ and then assemble them like LEGOs.

Especially in fields like AI and High-Performance Computing (HPC), which need to process staggering amounts of data, how quickly and efficiently you can connect these chiplets has become the key factor that determines performance.

๐Ÿ’ก So, what was wrong with the old way?
The traditional method using ‘solder bumps’ has clear physical limitations. The spacing (pitch) of these tiny solder balls is measured in tens of micrometers, and their size makes it incredibly difficult to dramatically increase the number of data pathways (I/O density). Technologies like SK Hynix’s MR-MUF are improvements, but they are still extensions of bump-based technology, not a fundamental solution.

 

2. Hybrid Bonding: The Magic of ‘Direct Connection’

This led to a new idea: “Let’s just get rid of the bumps altogether!” That’s the start of hybrid bonding. The core concept is ‘direct connection.’ It’s a technology that bonds the copper pads and their surrounding insulating material directly to each other without any intermediate material, fusing the wafer or chip surfaces at an atomic level.

The process demands extreme precision. First, a process called CMP (Chemical-Mechanical Polishing) makes the wafer surface unbelievably smooth—so smooth that imperfections just a few atoms high are unacceptable. Next, the surface is activated with plasma to prepare it for bonding. Then, the two surfaces are aligned with incredible accuracy and brought into contact at room temperature, where they weakly stick together due to molecular forces. Finally, an annealing (heating) step allows the copper atoms and insulator molecules to diffuse into each other, forming a powerful and permanent bond.

⚠️ So what’s the big deal?
With no bumps, the connection pitch can be reduced to hundreds of nanometers. This means you can create millions of I/O connections per square millimeter. The shorter path drastically reduces electrical resistance and signal interference, leading to much higher speeds and significantly lower power consumption. The direct copper contact also improves heat dissipation, and the overall package becomes thinner.

 

3. A Nanometer-Scale War: The Challenges Ahead

While the benefits are clear, the reality of implementing it is a ‘war fought at the nanometer scale.’ The technical hurdles are immense.

  • Surface Flatness: Even a tiny bump just a few atoms high can cause the bond to fail. The surface needs to be far smoother than a billiard table. Managing the CMP process is key to achieving good yields.
  • Surface Cleanliness: A single nanoparticle can ruin the connection. Plasma dicing is preferred over traditional blade dicing because it generates fewer particles.
  • Alignment Accuracy: To connect pads with a pitch of a few hundred nanometers, the alignment error must be within tens of nanometers—a fraction of the width of a human hair. This requires real-time correction for tiny amounts of wafer warpage.
  • Copper Oxidation: Even a thin layer of oxidation on the copper surface can prevent a bond, making it one of the biggest headaches. Solutions involve bonding in a vacuum or coating the surface with less reactive metals.
  • Dielectric Material: Choosing the right insulator involves a trade-off between thermal expansion, bonding strength, and electrical properties, requiring careful selection of materials like SiO2, SiCN, or polymers.

 

4. W2W vs. D2W: The Two Faces of Hybrid Bonding

Hybrid bonding comes in two main flavors: Wafer-to-Wafer (W2W), ideal for mass production, and Die-to-Wafer (D2W), used for more complex, precise structures.

Category Wafer-to-Wafer (W2W) Die-to-Wafer (D2W)
Concept Bonds two entire wafers at once. Bonds individual, pre-tested good dies onto a wafer.
Features High throughput, relatively simple process. Can exclude defective dies, essential for heterogeneous integration.
Applications CMOS Image Sensors, 3D NAND. HBM, AI Accelerators, Logic (Intel Foveros, etc.).

The high-quality camera sensors in our smartphones are a success story for W2W. HBM, however, requires the D2W approach to stack multiple layers of pre-tested DRAM chips, similar to carefully constructing a skyscraper one floor at a time.

๐Ÿ’ก The Brutal Math of D2W Yield
D2W faces a challenge on a whole different level: the brutal math of cumulative yield. For example, if the yield for bonding one layer is 99%, the final yield after stacking 10 layers becomes 0.99^10, which is only about 90%. That 1% failure rate at each step results in a 10% final defect rate. As the number of layers increases, the yield drops exponentially, which is why pre-testing for Known Good Die (KGD) is absolutely critical.

 

5. Pushing Forward and a Final Question

Despite these challenges, the technology continues to advance. Active research in ‘low-temperature bonding’ aims to bring process temperatures below 150-200°C for heat-sensitive chips like DRAM. At the same time, engineers are tackling thermal stress issues through new materials, processes, and structural designs.

Hybrid bonding is now expanding beyond sensors and HBM to logic and HPC, with technologies like Intel's ‘Foveros’ and TSMC’s ‘SoIC.’ It is unquestionably the key that will unlock the next level of chip performance and density, but it remains a pinnacle of advanced technology with a mountain of challenges to overcome.

Recently, researchers successfully bonded completely different materials at room temperature, like silicon carbide (SiC) and silicon (Si). This makes you wonder: what if, in the future, we could bond any material to another with atomic precision? What new devices could be born? What unimagined systems could become possible? I’ll leave you with that question to ponder as we conclude our deep dive.

Frequently Asked Questions ❓

Q: What makes hybrid bonding better than traditional solder bumps?
A: The biggest differences are ‘connection density’ and ‘efficiency.’ By eliminating the physical bumps, you can create far more and shorter data pathways. This leads directly to faster processing speeds and lower power consumption, which is essential for high-performance chips used in AI.
Q: What’s the biggest reason it’s so hard to apply hybrid bonding to HBM?
A: It comes down to the ‘cumulative yield’ problem. HBM involves stacking many layers of DRAM (8, 12, or even 16), which requires the Die-to-Wafer (D2W) method. Because you're bonding one chip at a time, even a tiny chance of failure at each step multiplies, drastically lowering the probability of producing a perfect final product.
Q: Is hybrid bonding already being used in commercial products?
A: Yes, it's actively used in certain areas. The best example is the ‘CMOS Image Sensor (CIS)’ in smartphone cameras. Sony adopted Wafer-to-Wafer (W2W) hybrid bonding early on to dramatically improve camera performance. However, the D2W method needed for HBM is much more complex and is still in the R&D phase.

์ฐจ์„ธ๋Œ€ HBM ์„ฑ๊ณต์„ ์ขŒ์šฐํ•  ์ฐจ์„ธ๋Œ€ ํŒจํ‚ค์ง• ๊ธฐ์ˆ , ํ•˜์ด๋ธŒ๋ฆฌ๋“œ ๋ณธ๋”ฉ ์‹ฌ์ธต ๋ถ„์„

 

“HBM4์™€ AI ๋ฐ˜๋„์ฒด ์‹œ๋Œ€, ์™œ ๋ชจ๋‘๊ฐ€ ‘ํ•˜์ด๋ธŒ๋ฆฌ๋“œ ๋ณธ๋”ฉ’์— ์ฃผ๋ชฉํ• ๊นŒ์š”?” ์†”๋”๋ณผ์„ ์—†์•ค ์ด ํ˜์‹ ์ ์ธ ํŒจํ‚ค์ง• ๊ธฐ์ˆ ์˜ ์›๋ฆฌ๋ถ€ํ„ฐ ๋‚˜๋…ธ๋ฏธํ„ฐ ๋‹จ์œ„์˜ ์น˜์—ดํ•œ ๊ธฐ์ˆ  ์ „์Ÿ, ๊ทธ๋ฆฌ๊ณ  HBM์— ์ ์šฉ๋˜๊ธฐ๊นŒ์ง€์˜ ํ—˜๋‚œํ•œ ๊ณผ์ •๊ณผ ๋ฏธ๋ž˜ ์ „๋ง๊นŒ์ง€, ํ•ต์‹ฌ๋งŒ ์™์™ ๋ฝ‘์•„ ์™„๋ฒฝํ•˜๊ฒŒ ์ •๋ฆฌํ•ด ๋“œ๋ฆฝ๋‹ˆ๋‹ค.

์•ˆ๋…•ํ•˜์„ธ์š”! ์ตœ๊ทผ SKํ•˜์ด๋‹‰์Šค๊ฐ€ HBM4 ๊ฐœ๋ฐœ ๋ฐ ์–‘์‚ฐ ์„ฑ๊ณต์„ ๋ฐœํ‘œํ•˜๋ฉด์„œ AI ๋ฐ˜๋„์ฒด ์‹œ์žฅ์ด ๋‹ค์‹œ ํ•œ๋ฒˆ ๋œจ๊ฒ๊ฒŒ ๋‹ฌ์•„์˜ฌ๋ž์Šต๋‹ˆ๋‹ค. ๋งŽ์€ ์ „๋ฌธ๊ฐ€์™€ ํˆฌ์ž์ž๋“ค์˜ ๊ด€์‹ฌ์€ ๋‹จ ํ•œ ๊ณณ์œผ๋กœ ์ ๋ ธ์ฃ . ๋ฐ”๋กœ ‘์ด๋ฒˆ HBM4์— ๊ฟˆ์˜ ๊ธฐ์ˆ ์ด๋ผ ๋ถˆ๋ฆฌ๋Š” ํ•˜์ด๋ธŒ๋ฆฌ๋“œ ๋ณธ๋”ฉ์ด ์ ์šฉ๋˜์—ˆ๋Š”๊ฐ€?’ ํ•˜๋Š” ์ ์ด์—ˆ์Šต๋‹ˆ๋‹ค.

๊ฒฐ๋ก ๋ถ€ํ„ฐ ๋ง์”€๋“œ๋ฆฌ๋ฉด, ์•„์ง์€ ์•„๋‹™๋‹ˆ๋‹ค. HBM4 ์ดˆ๊ธฐ ์–‘์‚ฐ์—๋Š” ๊ณ ๋„ํ™”๋œ ๊ธฐ์กด ๊ธฐ์ˆ (MR-MUF)์ด ์ ์šฉ๋œ ๊ฒƒ์œผ๋กœ ์˜์‹ฌ๋˜๋ฉฐ, ํ•˜์ด๋ธŒ๋ฆฌ๋“œ ๋ณธ๋”ฉ์€ 16๋‹จ ์ด์ƒ์˜ ์ดˆ๊ณ ์ ์ธต HBM์ด๋‚˜ ๋‹ค์Œ ์„ธ๋Œ€๋ฅผ ์œ„ํ•œ ‘๋ฏธ๋ž˜ ํ•ต์‹ฌ ๊ธฐ์ˆ ’๋กœ ๊ฐœ๋ฐœ ์ค‘์ธ ๋‹จ๊ณ„์— ์žˆ์Šต๋‹ˆ๋‹ค. ํ•˜์ง€๋งŒ ์ด ๊ธฐ์ˆ ์€ ์ด์ œ ๋‹จ์ˆœํ•œ ์˜ต์…˜์„ ๋„˜์–ด, ๋ฐ˜๋„์ฒด ํŒจํ‚ค์ง• ๊ฒฝ์Ÿ๋ ฅ์˜ ํ•ต์‹ฌ ๋ณ€๊ณก์ ์œผ๋กœ ๋– ์˜ฌ๋ž์Šต๋‹ˆ๋‹ค.

์ €๋Š” ๊ธฐ๊ณ„๊ณตํ•™ ์—”์ง€๋‹ˆ์–ด๋ง ๊ฒฝํ—˜์„ ๋ฐ”ํƒ•์œผ๋กœ ๋ฒ•ํ•™์„ ๊ณต๋ถ€ํ•˜๊ณ , AI ์ปดํ“จํŒ… ์„์‚ฌ ๊ณผ์ •์„ ๊ฑฐ์น˜๋ฉฐ ๋ฉ”๋ชจ๋ฆฌ ๋ฐ˜๋„์ฒด ์‚ฐ์—…์˜ ํŠนํ—ˆ๋“ค์„ ๋‹ค๋ค„์™”์Šต๋‹ˆ๋‹ค. ์ด๋Ÿฐ ๊ฒฝํ—˜์„ ํ†ตํ•ด ‘๋ณต์žกํ•œ ๊ธฐ์ˆ ์ผ์ˆ˜๋ก ๋” ๋งŽ์€ ์‚ฌ๋žŒ์ด ์ดํ•ดํ•  ์ˆ˜ ์žˆ๋„๋ก ์„ค๋ช…ํ•ด์•ผ ํ•œ๋‹ค’๋Š” ๊ฒƒ์„ ์ ˆ์‹คํžˆ ๊นจ๋‹ฌ์•˜์ฃ . ์ด ๊ธ€์ด ๊ธฐ์ˆ ๊ณผ ์‹œ์žฅ์„ ์ž‡๋Š” ์ž‘์€ ๊ฐ€๊ต๊ฐ€ ๋˜๊ธฐ๋ฅผ ๋ฐ”๋ž๋‹ˆ๋‹ค.

 

1. ์™œ ๊ฐ‘์ž๊ธฐ ‘์ฒจ๋‹จ ํŒจํ‚ค์ง•’์ด ์ค‘์š”ํ•ด์กŒ์„๊นŒ?

๋ฐ˜๋„์ฒด ์„ฑ๋Šฅ ๊ฒฝ์Ÿ์˜ ํŒ๋„๊ฐ€ ๋ฐ”๋€Œ๊ณ  ์žˆ๋‹ค๋Š” ์ด์•ผ๊ธฐ, ๋งŽ์ด ๋“ค์–ด๋ณด์…จ์„ ๊ฑฐ์˜ˆ์š”. ์ด์ œ ์นฉ ๋‚ด๋ถ€ ํšŒ๋กœ๋ฅผ ์–ผ๋งˆ๋‚˜ ์ž˜๊ฒŒ ๊นŽ๋А๋ƒ๋ฅผ ๋„˜์–ด์„œ, ์ด์ œ๋Š” ์—ฌ๋Ÿฌ ์นฉ์„ ‘์–ด๋–ป๊ฒŒ ์ž˜ ์—ฐ๊ฒฐํ•˜๊ณ  ์Œ“๋А๋ƒ’, ๋ฐ”๋กœ ‘ํŒจํ‚ค์ง•’์œผ๋กœ ๊ทธ ๋ฌด๊ฒŒ ์ค‘์‹ฌ์ด ์˜ฎ๊ฒจ๊ฐ€๊ณ  ์žˆ์Šต๋‹ˆ๋‹ค.

๊ฐ€์žฅ ํฐ ์ด์œ ๋Š” ์—ญ์‹œ ‘๋ฌด์–ด์˜ ๋ฒ•์น™’์ด ์˜ˆ์ „ ๊ฐ™์ง€ ์•Š๋‹ค๋Š” ๊ฑฐ์ฃ . ํšŒ๋กœ๋ฅผ ๋” ์ž‘๊ฒŒ ๋งŒ๋“œ๋Š” ๋ฐ ๋“œ๋Š” ๋น„์šฉ์ด๋‚˜ ๊ธฐ์ˆ ์ ์ธ ์–ด๋ ค์›€์ด ๋„ˆ๋ฌด ์ปค์กŒ์–ด์š”. ๊ทธ๋Ÿฌ๋‹ˆ๊นŒ ์ฐจ๋ผ๋ฆฌ ๊ธฐ๋Šฅ๋ณ„๋กœ ์ตœ์ ํ™”๋œ ๊ณต์ •์—์„œ ๋งŒ๋“  ์ž‘์€ ์นฉ๋“ค, ์š”์ฆ˜ ‘์นฉ๋ ›(Chiplet)’์ด๋ผ๊ณ  ๋ถ€๋ฅด์ฃ . ์ด๊ฑธ ๋”ฐ๋กœ ๋งŒ๋“ค์–ด์„œ ๋ ˆ๊ณ ์ฒ˜๋Ÿผ ๋”ฑ ์กฐ๋ฆฝํ•˜๋Š” ๊ฒŒ ์„ฑ๋Šฅ์ด๋‚˜ ๋น„์šฉ ๋ฉด์—์„œ ๋” ์œ ๋ฆฌํ•ด์ง„ ๊ฒ๋‹ˆ๋‹ค.

ํŠนํžˆ AI๋‚˜ ๊ณ ์„ฑ๋Šฅ ์ปดํ“จํŒ…(HPC) ๊ฐ™์ด ์ •๋ง ์–ด๋งˆ์–ด๋งˆํ•œ ๋ฐ์ดํ„ฐ๋ฅผ ์ฒ˜๋ฆฌํ•ด์•ผ ํ•˜๋Š” ๋ถ„์•ผ๊ฐ€ ์ปค์ง€๋ฉด์„œ, ์ด ์นฉ๋ ›๋“ค์„ ์–ผ๋งˆ๋‚˜ ๋น ๋ฅด๊ณ  ํšจ์œจ์ ์œผ๋กœ ์—ฐ๊ฒฐํ•˜๋А๋ƒ๊ฐ€ ์„ฑ๋Šฅ์„ ์ขŒ์šฐํ•˜๋Š” ํ•ต์‹ฌ์ด ๋œ ๊ฑฐ์ฃ .

๐Ÿ’ก ๊ทธ๋Ÿผ ๊ธฐ์กด ์—ฐ๊ฒฐ ๋ฐฉ์‹์˜ ํ•œ๊ณ„๋Š”?
๋ฐ”๋กœ ‘์†”๋” ๋ฒ”ํ”„’๋ผ๋Š” ์ž‘์€ ๋•œ๋‚ฉ ๋ณผ์˜ ๋ฌผ๋ฆฌ์ ์ธ ํฌ๊ธฐ ํ•œ๊ณ„๊ฐ€ ๋ช…ํ™•ํ•ด์š”. ํ˜„์žฌ ์†”๋” ๋ฒ”ํ”„์˜ ๊ฐ„๊ฒฉ(ํ”ผ์น˜)์€ ์ˆ˜์‹ญ ๋งˆ์ดํฌ๋กœ๋ฏธํ„ฐ ์ˆ˜์ค€์ธ๋ฐ, ์ด ๋™๊ทธ๋ž€ ๋ณผ ์ž์ฒด ํฌ๊ธฐ ๋•Œ๋ฌธ์— ์นฉ ์‚ฌ์ด์— ๋ฐ์ดํ„ฐ๋ฅผ ์ฃผ๊ณ ๋ฐ›๋Š” ํ†ต๋กœ ์ˆ˜(I/O ๋ฐ€๋„)๋ฅผ ํš๊ธฐ์ ์œผ๋กœ ๋Š˜๋ฆฌ๊ธฐ๊ฐ€ ์–ด๋ ต์Šต๋‹ˆ๋‹ค. SKํ•˜์ด๋‹‰์Šค์˜ MR-MUF ๊ฐ™์€ ๊ธฐ์ˆ ๋„ ์žˆ์ง€๋งŒ, ๊ทผ๋ณธ์ ์ธ ํ•ด๊ฒฐ์ฑ…์ด๋ผ๊ธฐ๋ณด๋‹จ ๋ฒ”ํ”„ ๊ธฐ๋ฐ˜ ๊ธฐ์ˆ ์˜ ์—ฐ์žฅ์„ ์— ๊ฐ€๊น์ฃ .

 

2. ํ•˜์ด๋ธŒ๋ฆฌ๋“œ ๋ณธ๋”ฉ: ๋ฒ”ํ”„๋ฅผ ์—†์•ค ‘์ง์ ‘ ์—ฐ๊ฒฐ’

๊ทธ๋ž˜์„œ ๋‚˜์˜จ ์•„์ด๋””์–ด๊ฐ€ “์ด ๋ฒ”ํ”„ ์ž์ฒด๋ฅผ ์•„์˜ˆ ์—†์•  ๋ฒ„๋ฆฌ์ž!” ์˜€์Šต๋‹ˆ๋‹ค. ์ด๊ฒŒ ๋ฐ”๋กœ ํ•˜์ด๋ธŒ๋ฆฌ๋“œ ๋ณธ๋”ฉ์˜ ์‹œ์ž‘์ž…๋‹ˆ๋‹ค. ํ•ต์‹ฌ์€ ‘์ง์ ‘ ์—ฐ๊ฒฐ’์ด์—์š”. ๊ธˆ์† ์—ฐ๊ฒฐ ํŒจ๋“œ(์ฃผ๋กœ ๊ตฌ๋ฆฌ)์™€ ๊ทธ ์ฃผ๋ณ€์„ ๊ฐ์‹ธ๋Š” ์ ˆ์—ฐ์ฒด๋ฅผ ์ค‘๊ฐ„ ๋ฌผ์งˆ ์ „ํ˜€ ์—†์ด, ์›จ์ดํผ๋‚˜ ์นฉ ํ‘œ๋ฉด ๊ทธ ์ž์ฒด๋ฅผ ์›์ž ์ˆ˜์ค€์—์„œ ๊ฒฐํ•ฉ์‹œํ‚ค๋Š” ๊ฑฐ์ฃ .

๊ณผ์ •์ด ์ •๋ง ๊ทน๋„์˜ ์ •๋ฐ€ํ•จ์„ ์š”๊ตฌํ•ฉ๋‹ˆ๋‹ค. ๋จผ์ € CMP(ํ™”ํ•™๊ธฐ๊ณ„์  ์—ฐ๋งˆ) ๊ณต์ •์œผ๋กœ ์›จ์ดํผ ํ‘œ๋ฉด์„ ์›์ž ๋ช‡ ๊ฐœ ๋†’์ด์˜ ํ ์ง‘๋„ ์šฉ๋‚ฉ ์•ˆ ๋  ์ •๋„๋กœ ๋งค๋„๋Ÿฝ๊ฒŒ ๋งŒ๋“ค์–ด์š”. ๊ทธ ๋‹ค์Œ ํ”Œ๋ผ์ฆˆ๋งˆ๋กœ ํ‘œ๋ฉด์„ ํ™œ์„ฑํ™”์‹œํ‚ค๊ณ , ์ดˆ์ •๋ฐ€ํ•˜๊ฒŒ ๋‘ ํ‘œ๋ฉด์„ ์ •๋ ฌํ•ด ์ƒ์˜จ์—์„œ ๋”ฑ ์ ‘์ด‰์‹œํ‚ค๋ฉด ๋ถ„์ž ์‚ฌ์ด์˜ ๋ฏธ์•ฝํ•œ ์ธ๋ ฅ์œผ๋กœ ์ผ๋‹จ ์‚ด์ง ๋ถ™์Šต๋‹ˆ๋‹ค. ๊ทธ๋ฆฌ๊ณ  ๋งˆ์ง€๋ง‰์œผ๋กœ ์—ด์ฒ˜๋ฆฌ(Annealing)๋ฅผ ํ•ด์ฃผ๋ฉด, ๊ตฌ๋ฆฌ ์›์ž๋ผ๋ฆฌ, ์ ˆ์—ฐ์ฒด ๋ถ„์ž๋ผ๋ฆฌ ์„œ๋กœ ํ™•์‚ฐํ•˜๋ฉฐ ์•„์ฃผ ๊ฐ•๋ ฅํ•˜๊ณ  ์˜๊ตฌ์ ์ธ ์ ‘ํ•ฉ์ด ์™„์„ฑ๋˜๋Š” ์›๋ฆฌ์ž…๋‹ˆ๋‹ค.

⚠️ ์ž ๊น, ๊ทธ๋ž˜์„œ ๋ญ๊ฐ€ ์ข‹์€ ๊ฑด๊ฐ€์š”?
๋ฒ”ํ”„๊ฐ€ ์—†์œผ๋‹ˆ ์—ฐ๊ฒฐ ๊ฐ„๊ฒฉ์„ ์ˆ˜๋ฐฑ ๋‚˜๋…ธ๋ฏธํ„ฐ ์ˆ˜์ค€๊นŒ์ง€ ์ค„์ผ ์ˆ˜ ์žˆ๊ฒŒ ๋ผ์š”. ์ด๊ฑด ์ œ๊ณฑ๋ฐ€๋ฆฌ๋ฏธํ„ฐ๋‹น ์ˆ˜๋ฐฑ๋งŒ ๊ฐœ ์ด์ƒ์˜ ์—ฐ๊ฒฐ ํ†ต๋กœ(I/O)๋ฅผ ๋งŒ๋“ค ์ˆ˜ ์žˆ๋‹ค๋Š” ๋œป์ž…๋‹ˆ๋‹ค. ์—ฐ๊ฒฐ ๊ธธ์ด๋„ ๊ทน๋‹จ์ ์œผ๋กœ ์งง์•„์ง€๋‹ˆ ์ „๊ธฐ์  ์ €ํ•ญ์ด๋‚˜ ์‹ ํ˜ธ ๊ฐ„์„ญ์ด ํ™• ์ค„์–ด ์†๋„๋Š” ํ›จ์”ฌ ๋นจ๋ผ์ง€๊ณ  ์ „๋ ฅ ์†Œ๋ชจ๋Š” ํฌ๊ฒŒ ๊ฐ์†Œํ•˜์ฃ . ๊ตฌ๋ฆฌ๊ฐ€ ์ง์ ‘ ๋ถ™์œผ๋‹ˆ ์—ด์„ ๋นผ๋Š” ๋ฐ๋„ ์œ ๋ฆฌํ•˜๊ณ  ํŒจํ‚ค์ง€ ์ „์ฒด ๋‘๊ป˜๋„ ์–‡์•„์ง‘๋‹ˆ๋‹ค.

 

3. ๋‚˜๋…ธ๋ฏธํ„ฐ ๋‹จ์œ„์˜ ์ „์Ÿ: ๋„˜์–ด์•ผ ํ•  ์‚ฐ๋“ค

์žฅ์ ์€ ํ™•์‹คํ•˜์ง€๋งŒ, ํ˜„์‹ค์€ ๊ทธ์•ผ๋ง๋กœ ‘๋‚˜๋…ธ๋ฏธํ„ฐ ๋‹จ์œ„์˜ ์ „์Ÿ’์ž…๋‹ˆ๋‹ค. ๋„˜์–ด์•ผ ํ•  ๊ธฐ์ˆ ์  ๋‚œ๊ด€์ด ์ •๋ง ๋งŽ์Šต๋‹ˆ๋‹ค.

  • ํ‘œ๋ฉด ํ‰ํƒ„๋„ (Surface Flatness): ์›์ž ๋ช‡ ๊ฐœ ๋†’์ด์˜ ์š”์ฒ ๋งŒ ์žˆ์–ด๋„ ๊ฒฐํ•ฉ์ด ์•ˆ ๋ฉ๋‹ˆ๋‹ค. ๊ฑฐ์˜ ๋‹น๊ตฌ๋Œ€๋ณด๋‹ค ํ›จ์”ฌ ๋” ๋งค๋„๋Ÿฌ์›Œ์•ผ ํ•˜์ฃ . CMP ๊ณต์ • ๊ด€๋ฆฌ๊ฐ€ ์ˆ˜์œจ์˜ ํ•ต์‹ฌ ๊ณผ์ œ์ž…๋‹ˆ๋‹ค.
  • ํ‘œ๋ฉด ์ฒญ์ •๋„ (Cleanliness): ๋ˆˆ์— ๋ณด์ด์ง€ ์•Š๋Š” ๋‚˜๋…ธ๋ฏธํ„ฐ ํฌ๊ธฐ์˜ ์ž…์ž ํ•˜๋‚˜๊ฐ€ ์ ‘ํ•ฉ ์‹คํŒจ๋กœ ์ด์–ด์ง‘๋‹ˆ๋‹ค. ๊ทธ๋ž˜์„œ ์นฉ์„ ์ž˜๋ผ๋‚ผ ๋•Œ ํ†ฑ๋‚  ๋ฐฉ์‹๋ณด๋‹ค ์ž…์ž ๋ฐœ์ƒ์ด ์ ์€ ํ”Œ๋ผ์ฆˆ๋งˆ ๋ฐฉ์‹์ด ์„ ํ˜ธ๋ฉ๋‹ˆ๋‹ค.
  • ์ •๋ ฌ ์ •ํ™•๋„ (Alignment): ์ˆ˜๋ฐฑ ๋‚˜๋…ธ๋ฏธํ„ฐ ํ”ผ์น˜๋ฅผ ๊ตฌํ˜„ํ•˜๋ ค๋ฉด ์ •๋ ฌ ์˜ค์ฐจ๋ฅผ ์ˆ˜์‹ญ ๋‚˜๋…ธ๋ฏธํ„ฐ, ์ฆ‰ ๋จธ๋ฆฌ์นด๋ฝ ๊ตต๊ธฐ์˜ ์ˆ˜์ฒœ ๋ถ„์˜ ์ผ ์ˆ˜์ค€์œผ๋กœ ๋งž์ถฐ์•ผ ํ•ฉ๋‹ˆ๋‹ค. ์›จ์ดํผ๊ฐ€ ๊ณต์ • ์ค‘ ๋ฏธ์„ธํ•˜๊ฒŒ ํœ˜๋Š” ๋ฌธ์ œ๊นŒ์ง€ ์‹ค์‹œ๊ฐ„์œผ๋กœ ๋ณด์ •ํ•ด์•ผ ํ•˜์ฃ .
  • ๊ตฌ๋ฆฌ ์‚ฐํ™” (Copper Oxidation): ํ‘œ๋ฉด์— ์•„์ฃผ ์–‡์€ ์‚ฐํ™”๋ง‰๋งŒ ์ƒ๊ฒจ๋„ ๊ฒฐํ•ฉ์„ ๋ฐฉํ•ดํ•˜๋Š” ๊ฐ€์žฅ ํฐ ๊ณจ์นซ๊ฑฐ๋ฆฌ ์ค‘ ํ•˜๋‚˜์ž…๋‹ˆ๋‹ค. ์ง„๊ณต์—์„œ ๋ถ™์ด๊ฑฐ๋‚˜, ์‚ฐํ™”๊ฐ€ ๋œ ๋˜๋Š” ๊ธˆ์†์œผ๋กœ ์ฝ”ํŒ…ํ•˜๋Š” ๋“ฑ์˜ ๋ฐฉ๋ฒ•์ด ์—ฐ๊ตฌ๋˜๊ณ  ์žˆ์Šต๋‹ˆ๋‹ค.
  • ์ ˆ์—ฐ์ฒด ์†Œ์žฌ (Dielectric Material): ๊ตฌ๋ฆฌ์™€์˜ ์—ดํŒฝ์ฐฝ ์ฐจ์ด, ์ดˆ๊ธฐ ๊ฒฐํ•ฉ๋ ฅ, ์ „๊ธฐ์  ํŠน์„ฑ ๋“ฑ์„ ๊ณ ๋ คํ•ด ์‚ฐํ™”๊ทœ์†Œ(SiO2), SiCN, ํด๋ฆฌ๋จธ ๋“ฑ ์šฉ๋„์— ๋งž๋Š” ์ตœ์ ์˜ ์†Œ์žฌ๋ฅผ ์„ ํƒํ•˜๊ณ  ๊ณต์ •์„ ๊ฐœ๋ฐœํ•ด์•ผ ํ•ฉ๋‹ˆ๋‹ค.

 

4. W2W vs D2W: ์–ด๋””์— ์–ด๋–ป๊ฒŒ ์“ฐ์ด๋‚˜?

ํ•˜์ด๋ธŒ๋ฆฌ๋“œ ๋ณธ๋”ฉ์€ ํฌ๊ฒŒ ๋‘ ๊ฐ€์ง€ ๋ฐฉ์‹์œผ๋กœ ๋‚˜๋‰ฉ๋‹ˆ๋‹ค. ๋Œ€๋Ÿ‰ ์ƒ์‚ฐ์— ์œ ๋ฆฌํ•œ Wafer-to-Wafer (W2W)์™€ ๋” ์ •๋ฐ€ํ•˜๊ณ  ๋ณต์žกํ•œ ๊ตฌ์กฐ์— ์“ฐ์ด๋Š” Die-to-Wafer (D2W)์ž…๋‹ˆ๋‹ค.

๊ตฌ๋ถ„ Wafer-to-Wafer (W2W) Die-to-Wafer (D2W)
๊ฐœ๋… ์›จ์ดํผ ๋‘ ์žฅ์„ ํ†ต์งธ๋กœ ์ ‘ํ•ฉ ์–‘ํ’ˆ ์นฉ(Die)๋งŒ ๊ณจ๋ผ ์›จ์ดํผ์— ํ•˜๋‚˜์”ฉ ์ ‘ํ•ฉ
ํŠน์ง• ์ƒ์‚ฐ์„ฑ ๋†’์Œ, ๊ณต์ • ๋น„๊ต์  ๋‹จ์ˆœ ๋ถˆ๋Ÿ‰ ์นฉ ์ œ์™ธ ๊ฐ€๋Šฅ, ์ด์ข… ์นฉ๋ › ๊ฒฐํ•ฉ์— ํ•„์ˆ˜
์‘์šฉ CMOS ์ด๋ฏธ์ง€ ์„ผ์„œ, 3D ๋‚ธ๋“œ HBM, AI ๊ฐ€์†๊ธฐ, ๋กœ์ง ๋ฐ˜๋„์ฒด(์ธํ…” ํฌ๋ฒ ๋กœ์Šค ๋“ฑ)

์Šค๋งˆํŠธํฐ ์นด๋ฉ”๋ผ ํ™”์งˆ์„ ๋†’์ธ CMOS ์ด๋ฏธ์ง€ ์„ผ์„œ๋Š” W2W ๋ฐฉ์‹์ด ์ผ์ฐ๋ถ€ํ„ฐ ์“ฐ์ธ ์„ฑ๊ณต ์‚ฌ๋ก€์ž…๋‹ˆ๋‹ค. ๋ฐ˜๋ฉด, ์—ฌ๋Ÿฌ ๊ฐœ์˜ D๋žจ ์นฉ์„ ์ˆ˜์ง์œผ๋กœ ์Œ“๋Š” HBM์€ ์–‘ํ’ˆ ์นฉ๋งŒ ๊ณจ๋ผ ์Œ“์•„์•ผ ํ•˜๋ฏ€๋กœ D2W ๋ฐฉ์‹์ด ํ•„์ˆ˜์ ์ด์ฃ . ๋งˆ์น˜ ๊ณ ์ธต ๋นŒ๋”ฉ์„ ํ•œ ์ธต ํ•œ ์ธต ์‹ ์ค‘ํ•˜๊ฒŒ ์Œ“์•„ ์˜ฌ๋ฆฌ๋Š” ๊ฒƒ๊ณผ ๊ฐ™์Šต๋‹ˆ๋‹ค.

๐Ÿ’ก D2W์˜ ‘๋ˆ„์  ์ˆ˜์œจ์˜ ํญ์ •’
D2W๋Š” W2W์™€๋Š” ์ฐจ์›์ด ๋‹ค๋ฅธ ์–ด๋ ค์›€์ด ์žˆ์Šต๋‹ˆ๋‹ค. ๋ฐ”๋กœ ‘๋ˆ„์  ์ˆ˜์œจ’ ๋ฌธ์ œ์ž…๋‹ˆ๋‹ค. ์˜ˆ๋ฅผ ๋“ค์–ด, ํ•œ ์ธต์„ ์Œ“์„ ๋•Œ ์ˆ˜์œจ์ด 99%๋ผ๊ณ  ํ•ด๋„ 10์ธต์„ ์Œ“์œผ๋ฉด ์ตœ์ข… ์ˆ˜์œจ์€ 0.99^10, ์•ฝ 90%๋กœ ๋š ๋–จ์–ด์ง‘๋‹ˆ๋‹ค. 1%์˜ ์‹คํŒจ์œจ์ด 10๋ฒˆ ์Œ“์ด๋ฉด 10%์˜ ๋ถˆ๋Ÿ‰์ด ๋˜๋Š” ์…ˆ์ด์ฃ . ์ธต์ˆ˜๊ฐ€ ๋งŽ์•„์งˆ์ˆ˜๋ก ์ˆ˜์œจ์ด ๊ธฐํ•˜๊ธ‰์ˆ˜์ ์œผ๋กœ ๋‚ฎ์•„์ง€๊ธฐ ๋•Œ๋ฌธ์—, ์‚ฌ์ „์— ์–‘ํ’ˆ ์นฉ(Known Good Die)์„ ํ™•์‹คํ•˜๊ฒŒ ์„ ๋ณ„ํ•˜๋Š” ๊ณผ์ •์ด ์ •๋ง ์ค‘์š”ํ•ฉ๋‹ˆ๋‹ค.

 

5. ๋ฏธ๋ž˜๋ฅผ ํ–ฅํ•œ ์ „์ง„, ๊ทธ๋ฆฌ๊ณ  ๋‚จ๊ฒจ์ง„ ์งˆ๋ฌธ

์ด๋Ÿฐ ์–ด๋ ค์›€ ์†์—์„œ๋„ ๊ธฐ์ˆ ์€ ๊ณ„์† ๋ฐœ์ „ํ•˜๊ณ  ์žˆ์Šต๋‹ˆ๋‹ค. D๋žจ์ฒ˜๋Ÿผ ์—ด์— ์•ฝํ•œ ์นฉ์„ ์œ„ํ•ด 200℃ ์ดํ•˜, ๋‚˜์•„๊ฐ€ 150℃ ์ˆ˜์ค€์—์„œ ๋ณธ๋”ฉํ•˜๋ ค๋Š” ‘์ €์˜จ ๋ณธ๋”ฉ’ ์—ฐ๊ตฌ๊ฐ€ ํ™œ๋ฐœํ•˜๋ฉฐ, ์—ดํŒฝ์ฐฝ ์ฐจ์ด๋กœ ์ธํ•œ ์‘๋ ฅ ๋ฌธ์ œ๋ฅผ ํ•ด๊ฒฐํ•˜๊ธฐ ์œ„ํ•ด ์†Œ์žฌ, ๊ณต์ •, ๊ตฌ์กฐ ์„ค๊ณ„ ๋“ฑ ๋‹ค๋ฐฉ๋ฉด์—์„œ ๋…ธ๋ ฅ์ด ์ด๋ค„์ง€๊ณ  ์žˆ์Šต๋‹ˆ๋‹ค.

ํ•˜์ด๋ธŒ๋ฆฌ๋“œ ๋ณธ๋”ฉ์€ ์ด์ œ CIS์™€ HBM์„ ๋„˜์–ด ์ธํ…”์˜ ‘ํฌ๋ฒ ๋กœ์Šค’, TSMC์˜ ‘SoIC’ ๊ฐ™์€ ๋กœ์ง ๋ฐ˜๋„์ฒด์™€ HPC ๋ถ„์•ผ๋กœ ๋น ๋ฅด๊ฒŒ ํ™•๋Œ€๋˜๊ณ  ์žˆ์Šต๋‹ˆ๋‹ค. ๊ทธ์•ผ๋ง๋กœ ์นฉ์˜ ์„ฑ๋Šฅ๊ณผ ๋ฐ€๋„๋ฅผ ๋Œ์–ด์˜ฌ๋ฆด ํ•ต์‹ฌ ์—ด์‡ ์ž„์—๋Š” ํ‹€๋ฆผ์—†์ง€๋งŒ, ๊ทน๋ณตํ•ด์•ผ ํ•  ๊ณผ์ œ๊ฐ€ ์‚ฐ๋”๋ฏธ ๊ฐ™์€ ์ฒจ๋‹จ ๊ธฐ์ˆ ์˜ ๊ฒฐ์ •์ฒด์ธ ์…ˆ์ด์ฃ .

์ตœ๊ทผ์—๋Š” ์„ฑ์งˆ์ด ์™„์ „ํžˆ ๋‹ค๋ฅธ ๋ฌผ์งˆ๋“ค, ์˜ˆ๋ฅผ ๋“ค์–ด ์ „๋ ฅ ๋ฐ˜๋„์ฒด์— ์“ฐ์ด๋Š” ํƒ„ํ™”๊ทœ์†Œ(SiC)์™€ ์ผ๋ฐ˜ ์‹ค๋ฆฌ์ฝ˜(Si)์„ ์ƒ์˜จ์—์„œ ์ง์ ‘ ๋ถ™์ด๋Š” ์—ฐ๊ตฌ๋„ ์žˆ์—ˆ์Šต๋‹ˆ๋‹ค. ์—ฌ๊ธฐ์„œ ํ•œ ๊ฑธ์Œ ๋” ๋‚˜์•„๊ฐ€ ์ด๋Ÿฐ ์ƒ์ƒ์„ ํ•ด๋ณผ ์ˆ˜ ์žˆ์„ ๊ฒƒ ๊ฐ™์Šต๋‹ˆ๋‹ค. ๋งŒ์•ฝ ๋ฏธ๋ž˜์— ์ •๋ง ์–ด๋–ค ์ข…๋ฅ˜์˜ ๋ฌผ์งˆ์ด๋“ , ์›จ์ดํผ๋“  ์นฉ์ด๋“  ์ƒ๊ด€์—†์ด ์›์ž ์ˆ˜์ค€์˜ ์ •๋ฐ€๋„๋กœ ์ž์œ ์ž์žฌ๋กœ ๋ถ™์ผ ์ˆ˜ ์žˆ๊ฒŒ ๋œ๋‹ค๋ฉด ์–ด๋–จ๊นŒ์š”? ๊ณผ์—ฐ ์–ด๋–ค ์ƒˆ๋กœ์šด ์†Œ์ž๊ฐ€ ํƒ„์ƒํ•  ์ˆ˜ ์žˆ์„์ง€, ์šฐ๋ฆฌ๊ฐ€ ์ง€๊ธˆ์€ ์ƒ์ƒํ•˜์ง€ ๋ชปํ•˜๋Š” ์–ด๋–ค ์ƒˆ๋กœ์šด ๊ธฐ๋Šฅ์˜ ์‹œ์Šคํ…œ์ด ๊ฐ€๋Šฅํ•ด์งˆ์ง€, ์ด ์งˆ๋ฌธ์„ ์—ฌ๋Ÿฌ๋ถ„๊ป˜ ๋‚จ๊ธฐ๋ฉฐ ์˜ค๋Š˜ ํƒ๊ตฌ๋ฅผ ๋งˆ๋ฌด๋ฆฌํ• ๊นŒ ํ•ฉ๋‹ˆ๋‹ค.

์ž์ฃผ ๋ฌป๋Š” ์งˆ๋ฌธ ❓

Q: ํ•˜์ด๋ธŒ๋ฆฌ๋“œ ๋ณธ๋”ฉ์ด ๊ธฐ์กด ์†”๋” ๋ฒ”ํ”„ ๋ฐฉ์‹๋ณด๋‹ค ์ข‹์€ ์ ์ด ๋ญ”๊ฐ€์š”?
A: ๊ฐ€์žฅ ํฐ ์ฐจ์ด๋Š” ‘์—ฐ๊ฒฐ ๋ฐ€๋„’์™€ ‘ํšจ์œจ’์ž…๋‹ˆ๋‹ค. ์†”๋” ๋ฒ”ํ”„๋ผ๋Š” ๋ฌผ๋ฆฌ์  ๊ตฌ์กฐ๋ฌผ์„ ์—†์•  ํ›จ์”ฌ ๋” ๋งŽ๊ณ  ์งง์€ ๋ฐ์ดํ„ฐ ํ†ต๋กœ๋ฅผ ๋งŒ๋“ค ์ˆ˜ ์žˆ์Šต๋‹ˆ๋‹ค. ์ด๋Š” ๊ณง ๋ฐ์ดํ„ฐ ์ฒ˜๋ฆฌ ์†๋„ ํ–ฅ์ƒ๊ณผ ์ „๋ ฅ ์†Œ๋ชจ ๊ฐ์†Œ๋กœ ์ด์–ด์ ธ AI ๋ฐ˜๋„์ฒด์ฒ˜๋Ÿผ ๊ณ ์„ฑ๋Šฅ์ด ์š”๊ตฌ๋˜๋Š” ์นฉ์— ํ•„์ˆ˜์ ์ž…๋‹ˆ๋‹ค.
Q: HBM์— ํ•˜์ด๋ธŒ๋ฆฌ๋“œ ๋ณธ๋”ฉ์„ ์ ์šฉํ•˜๊ธฐ ์–ด๋ ค์šด ๊ฐ€์žฅ ํฐ ์ด์œ ๋Š” ๋ฌด์—‡์ธ๊ฐ€์š”?
A: ๋ฐ”๋กœ ‘๋ˆ„์  ์ˆ˜์œจ’ ๋ฌธ์ œ์ž…๋‹ˆ๋‹ค. HBM์€ 8๋‹จ, 12๋‹จ, 16๋‹จ์ฒ˜๋Ÿผ ์—ฌ๋Ÿฌ ๊ฐœ์˜ D๋žจ ์นฉ์„ ์Œ“์•„ ์˜ฌ๋ฆฌ๋Š”๋ฐ, ์นฉ์„ ํ•˜๋‚˜์”ฉ ๋ถ™์ด๋Š” D2W(Die-to-Wafer) ๋ฐฉ์‹์„ ์‚ฌ์šฉํ•ฉ๋‹ˆ๋‹ค. ๊ฐ ์ธต์„ ๋ถ™์ผ ๋•Œ๋งˆ๋‹ค ์•„์ฃผ ์ž‘์€ ์‹คํŒจ ํ™•๋ฅ ์ด๋ผ๋„ ๊ณ„์† ๊ณฑํ•ด์ง€๊ธฐ ๋•Œ๋ฌธ์—, ์ตœ์ข…์ ์œผ๋กœ ์–‘ํ’ˆ์„ ๋งŒ๋“ค์–ด๋‚ผ ํ™•๋ฅ ์ด ๊ธ‰๊ฒฉํžˆ ๋–จ์–ด์ง€๊ธฐ ๋•Œ๋ฌธ์ž…๋‹ˆ๋‹ค.
Q: ํ•˜์ด๋ธŒ๋ฆฌ๋“œ ๋ณธ๋”ฉ ๊ธฐ์ˆ ์€ ์ด๋ฏธ ์ƒ์šฉํ™”๋˜์—ˆ๋‚˜์š”?
A: ๋„ค, ํŠน์ • ๋ถ„์•ผ์—์„œ๋Š” ์ด๋ฏธ ํ™œ๋ฐœํžˆ ์‚ฌ์šฉ๋˜๊ณ  ์žˆ์Šต๋‹ˆ๋‹ค. ๋Œ€ํ‘œ์ ์ธ ์˜ˆ๊ฐ€ ์Šค๋งˆํŠธํฐ ์นด๋ฉ”๋ผ์— ๋“ค์–ด๊ฐ€๋Š” ‘CMOS ์ด๋ฏธ์ง€ ์„ผ์„œ(CIS)’์ž…๋‹ˆ๋‹ค. ์†Œ๋‹ˆ๊ฐ€ W2W(Wafer-to-Wafer) ๋ฐฉ์‹์˜ ํ•˜์ด๋ธŒ๋ฆฌ๋“œ ๋ณธ๋”ฉ์„ ์ผ์ฐ ๋„์ž…ํ•˜์—ฌ ์นด๋ฉ”๋ผ ์„ฑ๋Šฅ์„ ํฌ๊ฒŒ ํ–ฅ์ƒ์‹œ์ผฐ์Šต๋‹ˆ๋‹ค. ๋‹ค๋งŒ HBM์— ์ ์šฉ๋  D2W ๋ฐฉ์‹์€ ์ด๋ณด๋‹ค ํ›จ์”ฌ ๋‚œ์ด๋„๊ฐ€ ๋†’์•„ ์•„์ง ์—ฐ๊ตฌ๊ฐœ๋ฐœ์ด ์ง„ํ–‰ ์ค‘์ž…๋‹ˆ๋‹ค.

Friday, September 12, 2025

De Facto Standard Patent Strategies and the Pitfalls of ‘Royalty-Free’: Lessons from Tesla, Qualcomm, and Google

 

That ‘Royalty-Free’ Gift… Can You Really Trust It? From Bluetooth to EV charging standards, we're diving into the complex world of patents and the calculated corporate strategies hidden behind the sweet promise of “free.” This article will give you a sharper eye for seeing what’s really going on in tech.

Hey there! In the world of tech, the term ‘Royalty-Free’ sounds pretty appealing, right? It feels like a free gift, and since it’s used in everyday things like Bluetooth, USB, and WebRTC, you might think you can use it without a second thought.

But is that really the case? Today, we’re going to dig into the complex issues lurking behind that attractive ‘royalty-free’ sign—namely, intellectual property (IP) problems and, sometimes, intentional strategic traps. The goal of this article is to help you see beyond the “Oh, it’s free!” mindset and understand the true nature of these technologies. So, where does the misunderstanding about ‘royalty-free’ begin?

 

๐Ÿค” “A Prefab House with a Free Frame?” The Real Face of Royalty-Free

The belief that ‘free means safe’ is actually the starting point for the biggest misconception. Royalty-free never means ‘zero risk.’ In reality, it’s just ‘a promise of a license with a very limited scope,’ not a complete hall pass from all patent issues.

To put it simply, it’s like a ‘prefab house where only the frame is free.’ The frame might not cost you anything, but you still have to pay for or figure out the crucial parts like walls, the roof, and plumbing on your own.

Bluetooth: ‘Enabling Technologies’ Are Not Covered

This becomes clear if you take a close look at Bluetooth’s Patent/Copyright License Agreement (PCLA). The royalty-free benefit is strictly limited to the ‘Compliant Portion’ of a certified product and only for ‘Necessary Claims’—patents that are technically essential to implement the standard and cannot be avoided.

More importantly, so-called ‘Enabling Technologies’ like semiconductor processes or operating systems are explicitly excluded from the license scope. The Bluetooth communication module itself might be covered, but the peripheral technologies needed to run it, like power management chips and audio codecs, can still be subject to separate patent disputes. In fact, more than 20 lawsuits were recently filed over Bluetooth’s frequency-hopping technology patents.

WebRTC: Google’s Umbrella Only Covers Google’s Code

The situation is similar with Google-led WebRTC. The royalty-free license Google provides generally applies only to ‘patents owned by Google’ and only when using the ‘original source code distributed by Google’ as-is. If a company modifies this code or adds new features to suit its service, the added parts are no longer under Google’s protective umbrella. This means they could be exposed to unexpected patent infringement lawsuits from third parties.

 

๐Ÿ“Š Stories from the Players in the Game

So, what have actual companies experienced in this complex game? Let’s look at a few key examples to see the risks firsthand.

Case 1: The AV1 Codec – “Attacked by Wolves from Outside the Fence”

In response to the expensive royalties of the HEVC codec, tech giants like Google and Netflix formed the Alliance for Open Media (AOMedia) and created a royalty-free codec called ‘AV1.’ They even included a strong defensive clause preventing member companies from suing each other over patents, creating a solid “patent-safe zone.”

However, this fence only protected them from the patents of member companies. A patent pool operator named Sisvel appeared from outside the fence, claiming that AV1 was a “Copycat Codec” that infringed on their patents. They began demanding license fees from users (€0.24 per device). This case showed the limits of a consortium’s “permeable shield”—it couldn’t block attacks from the outside.

Case 2: Tesla’s NACS – “‘Our Friends’ Get In Free”

In 2014, Tesla pledged to let others use its patents, as long as they were “acting in Good Faith.” However, the term ‘Good Faith’ was essentially a promise “not to attack us in any way.” When a capacitor manufacturer sued a company that Tesla had acquired, Tesla countersued, claiming the lawsuit itself was a violation of good faith.

This strategy proved brilliant when the U.S. government’s 2021 Infrastructure Act offered subsidies only for the competing CCS1 standard. Facing a crisis, Tesla declared NACS an open standard, not only qualifying for government subsidies but also pulling competitors into its ecosystem under the condition that they wouldn’t attack Tesla. It was a smart move to solidify market dominance through ‘free and open’ access.

Case 3: Qualcomm – The Two Sides of Geopolitical Risk

Qualcomm’s “No License, No Chips” policy illustrates another dimension of the problem. Qualcomm tied its patent licensing agreements to the total price of a smartphone to maximize profits, a practice that led to a fine of over 1 trillion won from the Korea Fair Trade Commission, a decision upheld by the Supreme Court. Interestingly, however, a U.S. court ruled that the same business model did not violate antitrust laws. This case starkly shows the ‘geopolitical risk’—how the same action can lead to completely different legal outcomes depending on a country’s industrial policy and national interests.

 

๐Ÿ’ก “The Razor and the Blade”: The Real Goal Behind Opening Up Tech

When companies open up their technology for free, there’s almost always a calculated reason behind it. Their goals can be summarized into three main categories.

Strategic Goal Explanation (Analogy) Key Example
Ecosystem Dominance & Customer Lock-in “The razor is free, the blades are not.” Attract users with a free tool to lock them into your platform or service. Microsoft (.NET → Azure)
Cost Avoidance & Reshaping Competition “Group buying to avoid a pricey toll road.” Form a consortium to evade expensive royalties from a competitor’s tech and weaken its influence. AOMedia (AV1 → HEVC)
Profit Maximization & Business Model Design “Charging the buffet based on the customer’s weight, not the food’s.” Designing royalty calculations to maximize revenue. Qualcomm (Chipset → Total Phone Price)

 

๐Ÿ›ก️ Avoiding the “Patent Minefield”: The Importance of FTO Analysis

So, how can companies protect themselves amidst these potential risks? The most fundamental and crucial tool is Freedom to Operate (FTO) analysis.

Many people mistakenly believe, ‘I patented this technology, so I can use it freely.’ But that’s not how it works. For example, let’s say a competitor holds a patent for technology ‘A.’ Even if you patent an improvement, ‘A+B,’ by adding feature ‘B,’ you could still be infringing on their ‘A’ patent the moment you manufacture your product. Your patent gives you rights to ‘B,’ but it doesn’t grant you the right to use ‘A.’

FTO analysis is the process of drawing a map to see if your product might step on someone else’s ‘patent mine.’ It’s an essential step to identify loopholes in royalty-free licenses and uncover unexpected risks in advance. When you consider that a lawsuit can cost millions, the expense of an FTO analysis is a very affordable ‘insurance policy.’

 

๐Ÿ“œ 5 Key Strategic Principles for Your Company

Based on the cases we’ve examined, here are five principles to remember when dealing with royalty-free technology.

  1. Principle 1: Always Get the Legal Basis in Writing. You need a formal agreement that specifies the license’s scope, terms, limitations, and termination clauses, not vague promises like “good faith.” The freer the tech, the more carefully you need to read the contract.
  2. Principle 2: Understand the Provider’s Real Revenue Model. You need to map out how they ultimately monetize their value. Evaluate it from a long-term Total Cost of Ownership (TCO) perspective, considering platform lock-in, data usage, and more.
  3. Principle 3: Analyze Beyond the Consortium’s “Defensive Shield.” It is essential to conduct an FTO analysis for patents held by non-members, especially Non-Practicing Entities (NPEs), and budget for potential royalty payments.
  4. Principle 4: Assess the “Geopolitical Risk” of IP Enforcement. Review IP regulations and legal precedents in key markets and be flexible enough to adapt your strategy to local conditions.
  5. Principle 5: If You Open Your Tech, Define Your Company’s “Azure.” When you open up a technology, you must set a clear ‘backend revenue model’ and Key Performance Indicators (KPIs) for the high-profit business you ultimately want to drive users toward.
๐Ÿ’ก

Must-Read! 5 Strategic Principles for Using “Free” Tech

1. Get It in Writing: Secure a formal contract, not vague promises like ‘good faith.’
2. Find the Real Revenue Model: Analyze the provider’s hidden motives, such as platform lock-in.
3. Look Beyond the Fence:
Always check for patent risks (FTO) from non-consortium members, especially NPEs.
4. Assess Geopolitical Risk: The same business model can face different legal judgments by country.
5. Define Your ‘Azure’: If you open your tech, have a clear backend revenue model to link it to.

Frequently Asked Questions ❓

Q: Are ‘royalty-free’ and ‘open source’ the same thing?
A: They’re different. ‘Open source’ mainly refers to a ‘copyright’ license for using, modifying, and distributing source code. In contrast, ‘royalty-free’ is closer in meaning to being free from ‘patent’ usage fees. Even open-source software can require separate patents to implement its technology, so it isn’t free from the risk of patent infringement.
Q: Isn’t FTO analysis too expensive and difficult?
A: The cost varies depending on the technology’s scope, but compared to patent litigation costs that can run into the millions, an FTO analysis is a very economical ‘insurance policy.’ It’s much smarter to find ‘patent mines’ in advance to alter a design or secure necessary licenses.
Q: What exactly is the FRAND principle?
A: FRAND stands for ‘Fair, Reasonable, and Non-Discriminatory.’ For patents essential to implementing a ‘standard technology’ used by multiple companies (like in telecommunications), the patent holder is obligated to offer licenses to anyone under these FRAND terms. This was a key issue in the Qualcomm case.
Q: We’re a small startup. Where should we start?
A: The very first step is to list which royalty-free or open-source technologies are core to your business. Then, carefully read their license agreements. If anything is unclear, seeking advice from an external IP expert is the best way to protect your company in the long run.

After today’s discussion, I hope you have a better sense of the weight behind the term ‘royalty-free.’ It reminds me of the old saying, “There’s no such thing as a free lunch.” When you encounter a new technology, the right question isn’t, “What can I save?” but rather, “What are the hidden costs? Who is the player gaining the most from this ecosystem?” Now is the time for that kind of wisdom. If you have any more questions, feel free to ask in the comments! ๐Ÿ˜‰

ํŠนํ—ˆ์˜ ๊ฐ€์น˜๋Š” ์ˆซ์ž๋กœ ๊ณ„์‚ฐํ•  ์ˆ˜ ์žˆ๋Š”๊ฐ€ — IP Cost Center๋ฅผ ๋ฒ—์–ด๋‚˜๊ธฐ ์œ„ํ•ด ๊ณ ๋ฏผํ–ˆ๋˜ ๊ฒƒ๋“ค

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